Patents by Inventor Giacomo Benvenuti

Giacomo Benvenuti has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220006658
    Abstract: The present invention is directed to a computer-implemented system for secure storage and transfer of digital data between users, based on a blockchain-like protocol, and to a computer-implemented method employing said computer system.
    Type: Application
    Filed: November 15, 2019
    Publication date: January 6, 2022
    Inventor: Giacomo Benvenuti
  • Patent number: 11214867
    Abstract: A showerhead for vacuum deposition of several species, the showerhead being divided into several quarters containing each at least one outlet for the species, each of the quarter defining the wall of an underlying compartment containing at least one species, wherein two adjacent compartments contains different species. A process for vacuum deposition of one or more species onto a substrate, including providing a substrate for thin film growth in a growth chamber, providing two or more species to be effused towards the substrate, effusing the two or more species towards the substrate with line of sight propagation and in high vacuum conditions, and obtaining a thin film with gradients of chemical elements composition, morphology or crystalline phase.
    Type: Grant
    Filed: July 24, 2019
    Date of Patent: January 4, 2022
    Assignee: ABCD TECHNOLOGY SARL
    Inventors: Giacomo Benvenuti, Estelle Halary Wagner, Christian Petit
  • Publication number: 20200190661
    Abstract: A chemical gas phase deposition process comprises steps of providing a high vacuum chamber, and inside the high vacuum chamber: positioning a substrate surface; positioning a mask parallel to the substrate surface, whereby the mask comprises one or more openings; adjusting a gap of determined dimension between the substrate surface and the mask; and orienting a plurality of chemical precursor beams of at least one precursor species towards the mask with line of sight propagation, each of the plurality of chemical precursor beams being emitted from an independent punctual source, and molecules of the chemical precursor pass through the one or more mask openings to impinge onto the substrate surface for deposition thereon. At least a part of the chemical precursor molecules decompose on the substrate surface at a decomposition temperature.
    Type: Application
    Filed: April 4, 2019
    Publication date: June 18, 2020
    Inventors: Giacomo Benvenuti, Estelle Wagner, Cosmin Sandu
  • Publication number: 20200010955
    Abstract: A showerhead for vacuum deposition of several species, the showerhead being divided into several quarters containing each at least one outlet for the species, each of the quarter defining the wall of an underlying compartment containing at least one species, wherein two adjacent compartments contains different species. A process for vacuum deposition of one or more species onto a substrate, including providing a substrate for thin film growth in a growth chamber, providing two or more species to be effused towards the substrate, effusing the two or more species towards the substrate with line of sight propagation and in high vacuum conditions, and obtaining a thin film with gradients of chemical elements composition, morphology or crystalline phase.
    Type: Application
    Filed: July 24, 2019
    Publication date: January 9, 2020
    Inventors: Giacomo BENVENUTI, Estelle Halary WAGNER, Christian PETIT
  • Patent number: 10400334
    Abstract: A showerhead for vacuum deposition of several species, the showerhead being divided into several quarters containing each at least one outlet for the species, each quarter defining the wall of an underlying compartment containing at least one species, wherein two adjacent compartments contain different species.
    Type: Grant
    Filed: September 12, 2016
    Date of Patent: September 3, 2019
    Assignee: ABCD TECHNOLOGY SARL
    Inventors: Giacomo Benvenuti, Estelle Halary Wagner, Christian Petit
  • Patent number: 10280506
    Abstract: A chemical gas phase deposition process comprises steps of providing a high vacuum chamber, and inside the high vacuum chamber: positioning a substrate surface; positioning a mask parallel to the substrate surface, whereby the mask comprises one or more openings; adjusting a gap of determined dimension between the substrate surface and the mask; and orienting a plurality of chemical precursor beams of at least one precursor species towards the mask with line of sight propagation, each of the plurality of chemical precursor beams being emitted from an independent punctual source, and molecules of the chemical precursor pass through the one or more mask openings to impinge onto the substrate surface for deposition thereon. At least a part of the chemical precursor molecules decompose on the substrate surface at a decomposition temperature.
    Type: Grant
    Filed: March 18, 2015
    Date of Patent: May 7, 2019
    Assignee: 3D-OXIDES
    Inventors: Giacomo Benvenuti, Estelle Wagner, Cosmin Sandu
  • Publication number: 20170096736
    Abstract: A showerhead for vacuum deposition of several species, the showerhead being divided into several quarters containing each at least one outlet for the species, each quarter defining the wall of an underlying compartment containing at least one species, wherein two adjacent compartments contain different species.
    Type: Application
    Filed: September 12, 2016
    Publication date: April 6, 2017
    Inventors: Giacomo BENVENUTI, Estelle Halary WAGNER, Christian PETIT
  • Publication number: 20170081756
    Abstract: A chemical gas phase deposition process comprises steps of providing a high vacuum chamber, and inside the high vacuum chamber: positioning a substrate surface; positioning a mask parallel to the substrate surface, whereby the mask comprises one or more openings; adjusting a gap of determined dimension between the substrate surface and the mask; and orienting a plurality of chemical precursor beams of at least one precursor species towards the mask with line of sight propagation, each of the plurality of chemical precursor beams being emitted from an independent punctual source, and molecules of the chemical precursor pass through the one or more mask openings to impinge onto the substrate surface for deposition thereon. At least a part of the chemical precursor molecules decompose on the substrate surface at a decomposition temperature.
    Type: Application
    Filed: March 18, 2015
    Publication date: March 23, 2017
    Inventors: Giacomo Benvenuti, Estelle Wagner, Cosmin Sandu
  • Publication number: 20150114566
    Abstract: The invention relates to an effusing source for film deposition made of a reservoir comprising one hole characterized by the fact that the hole diameter is less than one order of magnitude than the mean free path of the molecules determined by the pressure and its thickness is at least one order of magnitude smaller than the diameter. Preferably the source has several holes.
    Type: Application
    Filed: October 6, 2014
    Publication date: April 30, 2015
    Inventors: Giacomo BENVENUTI, Estelle HALARY-WAGNER, Simone AMOROSI, Patrik HOFFMANN
  • Patent number: 8852344
    Abstract: The invention relates to an effusing source for film deposition made of a reservoir comprising one hole characterized by the fact that the hole diameter is less than one order of magnitude than the mean free path of the molecules determined by the pressure and its thickness is at least one order of magnitude smaller than the diameter. Preferably the source has several holes.
    Type: Grant
    Filed: October 24, 2011
    Date of Patent: October 7, 2014
    Assignee: Ecole Polytechnique Federale de Lausanne (EPFL)
    Inventors: Giacomo Benvenuti, Estelle Halary-Wagner, Simone Amorosi, Patrik Hoffmann
  • Publication number: 20120037077
    Abstract: The invention relates to an effusing source for film deposition made of a reservoir comprising one hole characterized by the fact that the hole diameter is less than one order of magnitude than the mean free path of the molecules determined by the pressure and its thickness is at least one order of magnitude smaller than the diameter. Preferably the source has several holes.
    Type: Application
    Filed: October 24, 2011
    Publication date: February 16, 2012
    Inventors: Giacomo Benvenuti, Estelle Halary-Wagner, Simone Amorosi, Patrik Hoffmann
  • Publication number: 20110239940
    Abstract: A showerhead for vacuum deposition of several species, said showerhead being divided into several quarters containing each at least one outlet for said species, each of said quarter defining the wall of an underlying compartment containing at least one species, wherein two adjacent compartments contains different species.
    Type: Application
    Filed: October 8, 2009
    Publication date: October 6, 2011
    Inventors: Giacomo Benvenuti, Estelle Halary Wagner, Christian Petit
  • Publication number: 20070193519
    Abstract: The invention relates to an effusing source for film deposition made of a reservoir comprising one hole characterized by the fact that the hole diameter is less than one order of magnitude than the mean free path of the molecules determined by the pressure and its thickness is at least one order of magnitude smaller than the diameter. Preferably the source has several holes.
    Type: Application
    Filed: April 16, 2007
    Publication date: August 23, 2007
    Applicant: Ecole Polytechnique Federale De Lausanne (EPFL)
    Inventors: Giacomo Benvenuti, Estelle Halary-Wagner, Simone Amorosi, Patrik Hoffmann
  • Publication number: 20050166846
    Abstract: The invention relates to an effusing source for film deposition made of a reservoir comprising one hole characterized by the fact that the hole diameter is less than one order of magnitude than the mean free path of the molecules determined by the pressure and its thickness is at least one order of magnitude smaller than the diameter. Preferably the source has several holes.
    Type: Application
    Filed: May 2, 2003
    Publication date: August 4, 2005
    Inventors: Giacomo Benvenuti, Simone Amorosi, Estelle Halary-Wagner