Patents by Inventor Gian F. Lorusso

Gian F. Lorusso has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Calibration standards and methods
    Patent number: 7361941
    Abstract: Parameters of a metrology tool may be determined by measuring a dimension of a feature on a calibration standard with the tool and using the measured dimension and a known traceable value of the dimension to determine a value for the parameter. If the dimension of the feature on the standard has a known traceable value, different standards may be used to calibrate different tools.
    Type: Grant
    Filed: December 21, 2004
    Date of Patent: April 22, 2008
    Assignee: KLA-Tencor Technologies Corporation
    Inventors: Gian F. Lorusso, Christopher F. Bevis, Luca Grella, David L. Adler, Ian Smith