Abstract: A vacuum pumping system includes a vacuum pump and a soundproofing arrangement. The vacuum pump is accommodated in a pump housing. The soundproofing hood surrounds the pump housing and includes a hood air inlet and a hood air outlet. To improve dampening of the noise generated by the vacuum pumping system, one or more additional soundproofing shielding element(s) is/are provided between the hood air inlet and the pump housing air inlet and/or between the hood air outlet and the pump housing air outlet, respectively. The additional soundproofing shielding element(s) may be designed as a casing surrounding the pump housing and including a casing air inlet and a casing air outlet.

Abstract: A rotary vane vacuum pump includes a pump casing having a gas inlet port and a gas outlet port, a stator provided within the pump casing and defining a cylindrical stator chamber and a cylindrical rotor eccentrically arranged in the stator chamber and equipped with radially movable radial vanes, the vanes cooperating with the inner wall of the stator chamber for pumping a gas from the gas inlet port to the gas outlet port, the pump casing being filled with such an amount of oil that the stator is immersed in an oil bath acting as cooling and lubricating fluid, wherein a motor for driving the pump is further provided, the motor being arranged in a motor casing that is in fluid communication with the pump casing, whereby the motor is immersed in the oil bath.

Abstract: In a vacuum pumping system with a plurality of sputter ion pumps the considerable reduction in its overall axial size and weight is achieved by utilizing a plurality of axially superimposed sputter ion pumps and a common magnetic circuit, which comprises a pair of external magnets located at opposite axial ends of the pumping system, one or more intermediate magnets arranged alternated with the sputter ion pumps and a ferromagnetic yoke, internally enclosing the external magnets and the one or more intermediate magnets.