Abstract: A MEMS/NEMS actuator based on a phase change material is described in which the volumetric change observed when the phase change material changes from a crystalline phase to an amorphous phase is used to effectuate motion in the device. The phase change material may be changed from crystalline phase to amorphous phase by heating with a heater or by passing current directly through the phase change material, and thereafter quenched quickly by dissipating heat into a substrate. The phase change material may be changed from the amorphous phase to a crystalline phase by heating at a lower temperature. An application of the actuator is described to fabricate a phase change nano relay in which the volumetric expansion of the actuator is used to push a contact across an airgap to bring it into contact with a source/drain.

Abstract: A MEMS/NEMS actuator based on a phase change material is described in which the volumetric change observed when the phase change material changes from a crystalline phase to an amorphous phase is used to effectuate motion in the device. The phase change material may be changed from crystalline phase to amorphous phase by heating with a heater or by passing current directly through the phase change material, and thereafter quenched quickly by dissipating heat into a substrate. The phase change material may be changed from the amorphous phase to a crystalline phase by heating at a lower temperature. An application of the actuator is described to fabricate a phase change nano relay in which the volumetric expansion of the actuator is used to push a contact across an airgap to bring it into contact with a source/drain.

Abstract: A MEMS/NEMS actuator based on a phase change material is described in which the volumetric change observed when the phase change material changes from a crystalline phase to an amorphous phase is used to effectuate motion in the device. The phase change material may be changed from crystalline phase to amorphous phase by heating with a heater or by passing current directly through the phase change material, and thereafter quenched quickly by dissipating heat into a substrate. The phase change material may be changed from the amorphous phase to a crystalline phase by heating at a lower temperature. An application of the actuator is described to fabricate a phase change nano relay in which the volumetric expansion of the actuator is used to push a contact across an airgap to bring it into contact with a source/drain.

Abstract: In one aspect, a microelectronic device comprises: a suspended lithium-based thin film; and one or more electrodes disposed on the suspended lithium-based thin film, wherein the one or more electrodes comprises one or more fingers, and a width of at least one outer finger of the one or more fingers is smaller than a width of at least one inner finger of the one or more fingers.

Abstract: An Acousto-Optic Gyroscope (AOG) consisting of a photonic integrated device embedded into two inherently matched piezoelectric surface acoustic wave (SAW) resonators sharing the same acoustic cavity is disclosed. The micromachined strain-based AOG uses the effective index of the optical waveguide due to the acousto-optic effect rather than conventional displacement sensing.

Abstract: A piezoelectric two-dimensional mode resonator suited for high frequency filtering applications, with the ability to simultaneously excite lateral and vertical acoustic waves.

Abstract: An Acousto-Optic Gyroscope (AOG) consisting of a photonic integrated device embedded into two inherently matched piezoelectric surface acoustic wave (SAW) resonators sharing the same acoustic cavity is disclosed. The micromachined strain-based AOG uses the effective index of the optical waveguide due to the acousto-optic effect rather than conventional displacement sensing.

Abstract: An apparatus comprises: a body terminal comprising a first body electrode and a second body electrode; a gate terminal comprising a first gate electrode and a second gate electrode; a first actuator between the first body electrode and the first gate electrode, the first actuator comprising a first piezoelectric material; a second actuator between the second body electrode and the second gate electrode, the second actuator comprising a second piezoelectric material; a beam comprising a first end attached to the first actuator, a second end attached to the second actuator, and a suspended section between the first end and the second end; a metal channel attached to the suspended section of the beam; a source terminal extending over the beam; and a drain terminal extending over the beam.

Abstract: In one aspect, a microelectronic device comprises: a suspended lithium-based thin film; and one or more electrodes disposed on the suspended lithium-based thin film, wherein the one or more electrodes comprises one or more fingers, and a width of at least one outer finger of the one or more fingers is smaller than a width of at least one inner finger of the one or more fingers.

Abstract: A piezoelectric two-dimensional mode resonator suited for high frequency filtering applications, with the ability to simultaneously excite lateral and vertical acoustic waves.

Abstract: In one aspect, a microelectronic device comprises: a suspended lithium-based thin film; and one or more electrodes disposed on the suspended lithium-based thin film, wherein the one or more electrodes comprises one or more fingers, and a width of at least one outer finger of the one or more fingers is smaller than a width of at least one inner finger of the one or more fingers.

Abstract: Devices and methods for gravimetric sensing are disclosed. A gravimetric sensor includes a piezoelectric resonator and an encapsulating layer formed on the surface of the resonator. The encapsulating layer defines a channel within the encapsulating layer on the surface of the resonator. The sensor is fabricated by forming a piezoelectric resonator, forming a sacrificial layer on a surface of the piezoelectric resonator, forming an encapsulating layer over the sacrificial layer on the resonator, and etching the sacrificial layer to remove the sacrificial layer and form a channel on the surface of the resonator. The sensor is used by supplying the liquid to the channel of the gravimetric sensor, operating the piezoelectric resonator, detecting a change in a resonant frequency of the resonator, and determining a presence of the analyte in the liquid from the change in resonant frequency of the resonator.

Abstract: An apparatus comprises: a body terminal comprising a first body electrode and a second body electrode; a gate terminal comprising a first gate electrode and a second gate electrode; a first actuator between the first body electrode and the first gate electrode, the first actuator comprising a first piezoelectric material; a second actuator between the second body electrode and the second gate electrode, the second actuator comprising a second piezoelectric material; a beam comprising a first end attached to the first actuator, a second end attached to the second actuator, and a suspended section between the first end and the second end; a metal channel attached to the suspended section of the beam; a source terminal extending over the beam; and a drain terminal extending over the beam.

Abstract: A contour mode micromechanical piezoelectric resonator. The resonator has a bottom electrode; a top electrode; and a piezoelectric layer disposed between the bottom electrode and the top electrode. The piezoelectric resonator has a planar surface with a cantilevered periphery, dimensioned to undergo in-plane lateral displacement at the periphery. The resonator also includes means for applying an alternating electric field across the thickness of the piezoelectric resonator. The electric field is configured to cause the resonator to have a contour mode in-plane lateral displacement that is substantially in the plane of the planar surface of the resonator, wherein the fundamental frequency for the displacement of the piezoelectric resonator is set in part lithographically by the planar dimension of the bottom electrode, the top electrode or the piezoelectric layer.

Abstract: A bulk acoustic resonator assembly and methods for fabricated the resonator assembly is provided. The resonator includes a cavity on a first surface of a substrate, with a sheet of low acoustic loss material suspended over the cavity. The sheet of low acoustic loss material is configured such that an associated fundamental frequency of the sheet of low acoustic loss material is a function of a length of the sheet of low acoustic loss material in a direction parallel to the first surface of the substrate. A transducer includes an electromechanical layer on the sheet of low acoustic loss material and a patterned conductive material formed on the electromechanical material. The transducer is configured to induce vibrations in the low acoustic loss material upon application of an electrical signal to the conductive pattern.

Abstract: In one aspect, a microelectronic device comprises: a suspended lithium-based thin film; and one or more electrodes disposed on the suspended lithium-based thin film, wherein the one or more electrodes comprises one or more fingers, and a width of at least one outer finger of the one or more fingers is smaller than a width of at least one inner finger of the one or more fingers.

Abstract: Contour-mode piezoelectric devices and methods of forming contour mode piezoelectric devices. The contour mode piezoelectric device includes a piezoelectric film having first and second surfaces and suspended so that it is spaced away from a substrate. The contour mode piezoelectric device also includes first and second patterned electrodes respectively disposed on the first and second surfaces of the piezoelectric film, at least one of the first and second patterned electrodes having variable width along a length thereof.

Abstract: A contour mode micromechanical piezoelectric resonator. The resonator has a bottom electrode; a top electrode; and a piezoelectric layer disposed between the bottom electrode and the top electrode. The piezoelectric resonator has a planar surface with a cantilevered periphery, dimensioned to undergo in-plane lateral displacement at the periphery. The resonator also includes means for applying an alternating electric field across the thickness of the piezoelectric resonator. The electric field is configured to cause the resonator to have a contour mode in-plane lateral displacement that is substantially in the plane of the planar surface of the resonator, wherein the fundamental frequency for the displacement of the piezoelectric resonator is set in part lithographically by the planar dimension of the bottom electrode, the top electrode or the piezoelectric layer.

Abstract: Devices and methods for gravimetric sensing are disclosed. A gravimetric sensor includes a piezoelectric resonator and an encapsulating layer formed on the surface of the resonator. The encapsulating layer defines a channel within the encapsulating layer on the surface of the resonator. The sensor is fabricated by forming a piezoelectric resonator, forming a sacrificial layer on a surface of the piezoelectric resonator, forming an encapsulating layer over the sacrificial layer on the resonator, and etching the sacrificial layer to remove the sacrificial layer and form a channel on the surface of the resonator. The sensor is used by supplying the liquid to the channel of the gravimetric sensor, operating the piezoelectric resonator, detecting a change in a resonant frequency of the resonator, and determining a presence of the analyte in the liquid from the change in resonant frequency of the resonator.

Abstract: Piezoelectric switches and methods of forming piezoelectric switches. The piezoelectric switch includes first and second cantilever beam actuators. The second cantilever beam actuator has a projection that overlaps the first cantilever beam actuator in a contact region. The projection is mechanically separated from the first cantilever beam actuator by a nanogap such that the first and second cantilever beam actuators are electrically isolated from each other. Each of the first and second cantilever beam actuators includes a piezoelectric actuation layer.