Patents by Inventor Gianpaolo Mettifogo

Gianpaolo Mettifogo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Post-etching alkaline treatment process
    Patent number: 5964953
    Abstract: The present invention is directed to a process for removing aluminum contamination from the surface of an etched semiconductor wafer. The process is carried out by first lapping a semiconductor wafer in a lapping slurry containing aluminum, etching the wafer, and finally immersing the wafer in an aqueous bath, the bath comprising an alkaline component and a surfactant.
    Type: Grant
    Filed: May 26, 1998
    Date of Patent: October 12, 1999
    Assignee: MEMC Electronics Materials, Inc.
    Inventor: Gianpaolo Mettifogo