Patents by Inventor Gihong PARK

Gihong PARK has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • COOLING UNIT, APPARATUS FOR PROCESSING A SUBSTRATE AND METHOD OF PROCESSING A SUBSTRATE
    Publication number: 20230207347
    Abstract: An apparatus for processing a substrate may include a heating plate configured to heat a substrate placed thereon, a cooling conveyor including a conveyor configured to transfer a heated substrate, and a first cooling part configured to cool the heated substrate while transferring the heated substrate on the conveyor and configured to provide a cooling atmosphere relative to the heated substrate over the conveyor, and a transfer part configured to transfer the heated substrate from the heating plate onto the conveyor.
    Type: Application
    Filed: December 27, 2022
    Publication date: June 29, 2023
    Applicant: SEMES CO, LTD.
    Inventors: Jaeil HYUN, Gihong PARK, Jaesung JU, Jooyoung LEE