Patents by Inventor Gil Drachuck

Gil Drachuck has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for application of harmonic detectivity as a quality indicator for imaging-based overlay measurements
    Patent number: 11360397
    Abstract: An image-based overlay metrology system is disclosed. The system includes a controller couplable to a metrology sub-system. The controller is configured to receive a set of image signals of a first metrology target disposed on the sample from the metrology sub-system and determine a plurality of harmonic detectivity metric values by calculating a harmonic detectivity metric value for each of the plurality of image signals. The controller is also configured to identify a set of optical measurement conditions of the metrology sub-system based on the plurality of harmonic detectivity metric values, wherein the set of optical measurement conditions define a recipe for optical metrology measurements of the metrology sub-system. The controller then provides the recipe to the metrology sub-system for execution of one or more optical metrology measurements of one or more additional metrology targets.
    Type: Grant
    Filed: September 8, 2020
    Date of Patent: June 14, 2022
    Assignee: KLA Corporation
    Inventors: Gil Drachuck, Tom Leviant, David Gready
  • SYSTEM AND METHOD FOR APPLICATION OF HARMONIC DETECTIVITY AS A QUALITY INDICATOR FOR IMAGING-BASED OVERLAY MEASUREMENTS
    Publication number: 20210080839
    Abstract: An image-based overlay metrology system is disclosed. The system includes a controller couplable to a metrology sub-system. The controller is configured to receive a set of image signals of a first metrology target disposed on the sample from the metrology sub-system and determine a plurality of harmonic detectivity metric values by calculating a harmonic detectivity metric value for each of the plurality of image signals. The controller is also configured to identify a set of optical measurement conditions of the metrology sub-system based on the plurality of harmonic detectivity metric values, wherein the set of optical measurement conditions define a recipe for optical metrology measurements of the metrology sub-system. The controller then provides the recipe to the metrology sub-system for execution of one or more optical metrology measurements of one or more additional metrology targets.
    Type: Application
    Filed: September 8, 2020
    Publication date: March 18, 2021
    Inventors: Gil Drachuck, Tom Leviant, David Gready