Patents by Inventor Gil-Jun Yun

Gil-Jun Yun has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ion implanting apparatus and ion implanting method using the same
    Publication number: 20050133737
    Abstract: In an ion implanting apparatus and an ion implanting method using the same, the ion implanting apparatus includes a disk chamber containing a rotatable disk, a wafer mounted on the rotatable disk, and a charge sensor for monitoring a charged state of the wafer, the charge sensor being fixed to the disk chamber to be adjacent to and facing a surface of the wafer. An output of the charge sensor may be used as feedback to control the charged state of the wafer.
    Type: Application
    Filed: October 15, 2004
    Publication date: June 23, 2005
    Inventors: Gyeong-Su Keum, Seung-Ki Chae, Hyung-Sik Hong, Sang-Yeob Cha, Jae-Hyun Han, Tae-Sub Im, Hyun-Kyu Kang, Gil-Jun Yun, Doo-Guen Song