Patents by Inventor Gil-Jung Yun

Gil-Jung Yun has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Ion implanting apparatus and ion implanting method using the same
    Patent number: 7112810
    Abstract: In an ion implanting apparatus and an ion implanting method using the same, the ion implanting apparatus includes a disk chamber containing a rotatable disk, a wafer mounted on the rotatable disk, and a charge sensor for monitoring a charged state of the wafer, the charge sensor being fixed to the disk chamber to be adjacent to and facing a surface of the wafer. An output of the charge sensor may be used as feedback to control the charged state of the wafer.
    Type: Grant
    Filed: October 15, 2004
    Date of Patent: September 26, 2006
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Gyeong-Su Keum, Seung-Ki Chae, Hyung-Sik Hong, Sang-Yeob Cha, Jae-Hyun Han, Tae-Sub Im, Hyun-Kyu Kang, Gil-Jung Yun, Doo-Guen Song