Patents by Inventor Gil Shetrit

Gil Shetrit has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Manufacturing method of semiconductor device
    Patent number: 7064046
    Abstract: The invention provides an algorithm for aligning a rotating blade in a dicing process of partially dicing a wafer attached to a substrate. A width of a cut groove and distance between pads in the cut groove are detected by a recognition camera. Based on a result of this detection, alignment data ?y which is distance between a centerline of the width of the cut groove and a real centerline are calculated. Based on a difference between the distance of the pads in the cut groove and a target value of the distance, data ?z on alignment in a depth direction of the cut groove is calculated. The rotating blade is aligned by using the alignment data ?y and ?z.
    Type: Grant
    Filed: February 5, 2004
    Date of Patent: June 20, 2006
    Assignees: Sanyo Electric Co., Ltd., Kanto Sanyo Semiconductors Co., Ltd.
    Inventors: Motoaki Wakui, Isao Ochiai, Ron Eyal, Gil Shetrit
  • Manufacturing method of semiconductor device
    Publication number: 20050009302
    Abstract: The invention provides an algorithm for aligning a rotating blade in a dicing process of partially dicing a wafer attached to a substrate. A width of a cut groove and distance between pads in the cut groove are detected by a recognition camera. Based on a result of this detection, alignment data ?y which is distance between a centerline of the width of the cut groove and a real centerline are calculated. Based on a difference between the distance of the pads in the cut groove and a target value of the distance, data ?z on alignment in a depth direction of the cut groove is calculated. The rotating blade is aligned by using the alignment data ?y and ?z.
    Type: Application
    Filed: February 5, 2004
    Publication date: January 13, 2005
    Applicant: Sanyo Electric Co., Ltd.
    Inventors: Motoaki Wakui, Isao Ochiai, Ron Eyal, Gil Shetrit