Patents by Inventor Gil-Sung SHIN

Gil-Sung SHIN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • APPARATUS AND SYSTEM FOR WAFER SPIN PROCESS
    Publication number: 20200203209
    Abstract: An apparatus for performing a wafer spin process is provided. The apparatus includes a base member, a rotatable member, and a wafer guide. The base member includes a plurality of first magnetic components. The rotatable member is disposed over the base member and includes a plurality of second magnetic components. The wafer guide is disposed over the rotatable member for holding a wafer.
    Type: Application
    Filed: October 23, 2019
    Publication date: June 25, 2020
    Inventors: Gil-Sung SHIN, Chang-Hyeon Nam, Injoon Yeo