Patents by Inventor Gilad Erel

Gilad Erel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of operating a charged particle beam specimen inspection system
    Patent number: 10522327
    Abstract: A charged particle beam specimen inspection system is described. The system includes an emitter for emitting at least one charged particle beam, a specimen support table configured for supporting the specimen, an objective lens for focusing the at least one charged particle beam, a charge control electrode provided between the objective lens and the specimen support table, wherein the charge control electrode has at least one aperture opening for the at least one charged particle beam, and a flood gun configured to emit further charged particles for charging of the specimen, wherein the charge control electrode has a flood gun aperture opening.
    Type: Grant
    Filed: July 25, 2018
    Date of Patent: December 31, 2019
    Assignee: Applied Materials Israel Ltd.
    Inventors: Gilad Erel, Michal Avinun-Kalish, Stefan Lanio
  • METHOD OF OPERATING A CHARGED PARTICLE BEAM SPECIMEN INSPECTION SYSTEM
    Publication number: 20180330919
    Abstract: A charged particle beam specimen inspection system is described. The system includes an emitter for emitting at least one charged particle beam, a specimen support table configured for supporting the specimen, an objective lens for focusing the at least one charged particle beam, a charge control electrode provided between the objective lens and the specimen support table, wherein the charge control electrode has at least one aperture opening for the at least one charged particle beam, and a flood gun configured to emit further charged particles for charging of the specimen, wherein the charge control electrode has a flood gun aperture opening.
    Type: Application
    Filed: July 25, 2018
    Publication date: November 15, 2018
    Inventors: Gilad Erel, Michal Avinun-Kalish, Stefan Lanio
  • Charged particle beam specimen inspection system and method for operation thereof
    Patent number: 10056228
    Abstract: A charged particle beam specimen inspection system is described. The system includes an emitter for emitting at least one charged particle beam, a specimen support table configured for supporting the specimen, an objective lens for focusing the at least one charged particle beam, a charge control electrode provided between the objective lens and the specimen support table, wherein the charge control electrode has at least one aperture opening for the at least one charged particle beam, and a flood gun configured to emit further charged particles for charging of the specimen, wherein the charge control electrode has a flood gun aperture opening.
    Type: Grant
    Filed: July 29, 2014
    Date of Patent: August 21, 2018
    Assignee: Applied Materials Israel Ltd.
    Inventors: Gilad Erel, Michal Avinun-Kalish, Stefan Lanio
  • CHARGED PARTICLE BEAM SPECIMEN INSPECTION SYSTEM AND METHOD FOR OPERATION THEREOF
    Publication number: 20160035537
    Abstract: A charged particle beam specimen inspection system is described. The system includes an emitter for emitting at least one charged particle beam, a specimen support table configured for supporting the specimen, an objective lens for focusing the at least one charged particle beam, a charge control electrode provided between the objective lens and the specimen support table, wherein the charge control electrode has at least one aperture opening for the at least one charged particle beam, and a flood gun configured to emit further charged particles for charging of the specimen, wherein the charge control electrode has a flood gun aperture opening.
    Type: Application
    Filed: July 29, 2014
    Publication date: February 4, 2016
    Inventors: Gilad Erel, Michal Avinun-Kalish, Stefan Lanio