Patents by Inventor Gilbert Dornieden

Gilbert Dornieden has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device for the generation of a gas curtain for plasma-based EUV radiation sources
    Patent number: 7750327
    Abstract: The invention is directed to a device for generating flows of gas for filtering the radiation emitted in plasma-based radiation sources. It is the object of the invention to find a novel possibility for generating a gas curtain in the immediate vicinity of a radiating plasma so as to permit a simple arrangement and design and a long life of the device for generating the gas curtain under extreme thermal stress. According to the invention, this object is met in that a slit nozzle is formed of a plurality of partial bodies comprising different materials to form a supersonic nozzle profile for the generation of a broad gas curtain in order to accommodate the slit nozzle to different thermal and precision-mechanical requirements in the gas inlet region and in the gas outlet region.
    Type: Grant
    Filed: May 14, 2008
    Date of Patent: July 6, 2010
    Assignee: XTREME technologies GmbH
    Inventors: Chinh Duc Tran, Jesko Brudermann, Bjoern Mader, Gilbert Dornieden, Thomas Brauner
  • DEVICE FOR THE GENERATION OF A GAS CURTAIN FOR PLASMA-BASED EUV RADIATION SOURCES
    Publication number: 20080283779
    Abstract: The invention is directed to a device for generating flows of gas for filtering the radiation emitted in plasma-based radiation sources. It is the object of the invention to find a novel possibility for generating a gas curtain in the immediate vicinity of a radiating plasma so as to permit a simple arrangement and design and a long life of the device for generating the gas curtain under extreme thermal stress. According to the invention, this object is met in that a slit nozzle is formed of a plurality of partial bodies comprising different materials to form a supersonic nozzle profile for the generation of a broad gas curtain in order to accommodate the slit nozzle to different thermal and precision-mechanical requirements in the gas inlet region and in the gas outlet region.
    Type: Application
    Filed: May 14, 2008
    Publication date: November 20, 2008
    Inventors: Chinh Duc TRAN, Jesko BRUDERMANN, Bjoern Mader, Gilbert Dornieden, Thomas Brauner