Patents by Inventor Gillian Walsh

Gillian Walsh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Laser machining system and method
    Patent number: 7887712
    Abstract: A substrate (16) is machined to form, for example, a via. The substrate is in a chamber (15) within which the gaseous environment is controlled. The machining laser beam (13) is delivered with control of parameters such as pulsing parameters to achieve desired effects. The gaseous environment may be controlled to control integral development of an insulating lining for a via, thereby avoiding the need for downstream etching and oxide growth steps. Also, machining may be performed in multiple passes in order to minimize thermal damage and to achieve other desired effects such as a particular via geometry.
    Type: Grant
    Filed: March 22, 2002
    Date of Patent: February 15, 2011
    Assignee: Electro Scientific Industries, Inc.
    Inventors: Adrian Boyle, Oonagh Meighan, Gillian Walsh, Kia Woon Mah
  • Laser machining system and method
    Publication number: 20020170891
    Abstract: A substrate (16) is machined to form, for example, a via. The substrate is in a chamber (15) within which the gaseous environment is controlled. The machining laser beam (13) is delivered with control of parameters such as pulsing parameters to achieve desired effects. The gaseous environment may be controlled to control integral development of an insulating lining for a via, thereby avoiding the need for downstream etching and oxide growth steps. Also, machining may be performed in multiple passes in order to minimize thermal damage and to achieve other desired effects such as a particular via geometry.
    Type: Application
    Filed: March 22, 2002
    Publication date: November 21, 2002
    Inventors: Adrian Boyle, Oonagh Meighan, Gillian Walsh, Kia Woon Mah