Abstract: A pressure sensor (40) useful as a vacuum manometer. A reference pressure cavity (50) of the sensor is evacuated through an evacuation opening (72) located behind a plate portion (54) of the sensor electrode (52) having a non-planar surface for supporting the diaphragm (44) during an overpressure event. The electrode is hermetically sealed to the body (42) of the sensor by a brazed joint with a ceramic seal member (60) disposed there between. The brazed joint may include a layer of buffer material (79) which provides a degree of malleability to the joint to avoid cracking of the ceramic seal member. The brazed ceramic/metal joint permits the selection of materials such that differential thermal expansion effects can be passively minimized. The electrode is connected to the sensor circuitry (84) by a wire having a spring section (53), thereby providing a stress free interconnection.

Abstract: A pressure sensor (40) useful as a vacuum manometer. A reference pressure cavity (50) of the sensor is evacuated through an evacuation opening (72) located behind a plate portion (54) of the sensor electrode (52) having a non-planar surface for supporting the diaphragm (44) during an overpressure event. The electrode is hermetically sealed to the body (42) of the sensor by a brazed joint with a ceramic seal member (60) disposed there between. The brazed joint may include a layer of buffer material (79) which provides a degree of malleability to the joint to avoid cracking of the ceramic seal member. The brazed ceramic/metal joint permits the selection of materials such that differential thermal expansion effects can be passively minimized. The electrode is connected to the sensor circuitry (84) by a wire having a spring section (53), thereby providing a stress free interconnection.

Abstract: A capacitive sensor (10) producing an output signal (VOUT) that is insensitive to stray capacitance (CS) caused by environmental and aging conditions. The sensor includes a sensing electrode (11) that exhibits a total capacitance that is responsive to both the measured process variable and to stray capacitance (CT=CA+CS). The sensor also includes a reference electrode (19) that exhibits a stray capacitance (CS?) essentially the same as that of the sensing electrode, but that is insensitive to the process variable. Balancing circuitry (29) provides an output signal that is responsive to the measured process variable and insensitive to the stray capacitance (VOUT=CT?CS?). The reference electrode is manufactured of the same materials and dimensions as the sensing electrode and may be mounted in the sensor body proximate the sensing electrode.

Abstract: A capacitive pressure sensor for measuring a pressure applied to an elastic member includes a capacitive plate disposed adjacent to the elastic member so as to define a gap between a planar conductive surface of the elastic member and a corresponding planar surface of the capacitive plate. The gap, capacitive plate and elastic member together define a capacitor having a characteristic capacitance. The sensor further includes an elongated electrical conductor characterized by an associated inductance value. The conductor is fixedly attached to and electrically coupled with the capacitive plate. The gap between the capacitive plate and the elastic member varies as a predetermined function of the pressure applied to the elastic member so as to vary the characteristic capacitance. The capacitor and the electrical conductor together form an electrical resonator having a characteristic resonant frequency. Varying the capacitance of this tank circuit varies the resonant frequency of the tank circuit.

Abstract: A capacitive sensor includes an elastic member extending about a central axis, having a central region, a peripheral region, a first side, and a second side. An overpressure stop member has an inner surface and an outer surface. The inner surface of the overpressure stop member has a contour adapted to limit deflection of the elastic member caused by a differential pressure between the two regions across the elastic member. The outer surface of the overpressure stop member has an first electrically conductive region. A second plate is spaced apart from the outer surface of the overpressure stop member, and being connected to the central region of the elastic member by a post, wherein the post transfers deformation of the elastic member caused by differential pressure across the elastic member to movement of the second plate along the central axis.

Abstract: A capacitive pressure sensor for measuring a pressure applied to an elastic member includes a capacitive plate disposed adjacent to the elastic member so as to define a gap between a planar conductive surface of the elastic member and a corresponding planar surface of the capacitive plate. The gap, capacitive plate and elastic member together define a capacitor having a characteristic capacitance. The sensor further includes an elongated electrical conductor characterized by an associated inductance value. The conductor is fixedly attached to and electrically coupled with the capacitive plate. The gap between the capacitive plate and the elastic member varies as a predetermined function of the pressure applied to the elastic member so as to vary the characteristic capacitance. The capacitor and the electrical conductor together form an electrical resonator having a characteristic resonant frequency. Varying the capacitance of this tank circuit varies the resonant frequency of the tank circuit.

Abstract: A capacitive pressure sensor for measuring a pressure applied to an elastic member includes a capacitive plate disposed adjacent to the elastic member so as to define a gap between a planar conductive surface of the elastic member and a corresponding planar surface of the capacitive plate. The gap, capacitive plate and elastic member together define a capacitor having a characteristic capacitance. The sensor further includes an elongated electrical conductor characterized by an associated inductance value. The conductor is fixedly attached to and electrically coupled with the capacitive plate. The gap between the capacitive plate and the elastic member varies as a predetermined function of the pressure applied to the elastic member so as to vary the characteristic capacitance. The capacitor and the electrical conductor together form an electrical resonator having a characteristic resonant frequency. Varying the capacitance of this tank circuit varies the resonant frequency of the tank circuit.

Abstract: A capacitive pressure sensor for measuring a pressure applied to an elastic member includes a capacitive plate disposed adjacent to the elastic member so as to define a gap between a planar conductive surface of the elastic member and a corresponding planar surface of the capacitive plate. The gap, capacitive plate and elastic member together define a capacitor having a characteristic capacitance. The sensor further includes an elongated electrical conductor characterized by an associated inductance value. The conductor is fixedly attached to and electrically coupled with the capacitive plate. The gap between the capacitive plate and the elastic member varies as a predetermined function of the pressure applied to the elastic member so as to vary the characteristic capacitance. The capacitor and the electrical conductor together form an electrical resonator having a characteristic resonant frequency. Varying the capacitance of this tank circuit varies the resonant frequency of the tank circuit.

Abstract: A capacitive pressure sensor includes a housing element, a first electrode assembly and a second electrode assembly. The first electrode assembly includes a deformable elastic member, and a plurality of petal electrodes. The petal electrodes are attached to the elastic member and extend from the elastic member in a direction which is substantially perpendicular to the surface of the elastic member. The elastic member of the first electrode assembly is secured at its perimeter to the housing element at an aperture in the housing, so that the petal electrodes are enclosed within the housing. The second electrode assembly is also enclosed within the housing and is surrounded by the elongated electrodes. The spatial relationship between the petal electrodes and the second electrode assembly is directly related to the capacitance measured between them.

Abstract: A differential pressure transducer includes a pair of interior chambers separated by a peripherally supported, nominally planar electrically conductive diaphragm. A magnetic assembly is positioned on at least one chamber wall opposite to a central portion of the diaphragm. The magnetic assembly includes an electrical conductor and preferably a magnetic field permeable electric field shield between the electrical conductor and the chamber so that as the central portion of diaphragm is displaced from its nominal plane in response to an applied pressure differential, the inductance of the magnetic assembly changes. The transducer may be a portion of a tank circuit of an oscillator having a frequency of oscillation that varies with the pressure differential applied across the diaphragm.

Abstract: A differential pressure transducer includes a pair of interior chambers separated by a peripherally supported, nominally planar electrically conductive diaphragm. A magnetic assembly is positioned on at least one chamber wall opposite to a central portion of the diaphragm. The magnetic assembly includes an electrical conductor and preferably a magnetic field permeable electric field shield between the electrical conductor and the chamber so that as the central portion of diaphragm is displaced from its nominal plane in response to an applied pressure differential, the inductance of the magnetic assembly changes the transducer may be a portion of a tank circuit of an oscillator having a frequency of oscillation that varies with the pressure differential applied across the diaphragm.

Abstract: A melt pressure measurement probe for insertion through wall of melt-containing vessel has a pressure-deflectable end portion for contact with pressurized melt. Pressure-resistant securing means fixes the end surface in a non-flow obstruction relationship. A seal surface on the probe prevents exposure of the melt to the securing means. Pressure detection means internal of the probe, responsive to deflection of the probe end surface to detect melt pressure, comprises a temperature-compensated capacitive sensor, one capacitor plate defined by the end portion and an opposite capacitor plate in the probe with a capacitive gap in-between. Electronic circuitry remote from the melt-exposed end, including circuitry within the probe to generate a signal proportional to the capacitance, compensates for change of temperature of the capacitor to generate an output signal proportional to melt pressure.

Abstract: The invention features a melt pressure measurement device for measuring the pressure of a melted substance useful in cooled state for forming solid objects. The device comprises a probe for insertion through an aperture in a wall of a melt-containing vessel, with the probe having a pressure-deflectable end surface for contact with pressurized melt. The probe has pressure-resistant securing means for fixing the probe in the wall with the end surface of the probe exposed for contact with the melt in a non-flow obstructive relationship. A seal surface on the probe between the end of the probe and the securing means provides cooperative sealing action with a mating sealing means associated with the wall to prevent exposure of the melt to the securing means. The probe also has pressure detection means internal of the probe, responsive to deflection of the end surface of the probe, for detecting pressure of the melt.