Patents by Inventor Girish M. HUNDI

Girish M. HUNDI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CHAMBER COMPONENT CLEANLINESS MEASUREMENT SYSTEM
    Publication number: 20220252548
    Abstract: An apparatus for measuring contaminants on a surface of a component is provided. An extraction vessel for holding a measurement fluid has an opening adapted to form a meniscus using the measurement fluid. An actuator moves at least one of the extraction vessel and the component to a position where the meniscus is in contact with the surface of the component. A transducer is positioned to provide acoustic energy to the measurement fluid.
    Type: Application
    Filed: May 19, 2020
    Publication date: August 11, 2022
    Inventors: Amir A. YASSERI, Duane OUTKA, Armen AVOYAN, Kennet Cresencio BAYLON, John DAUGHERTY, Girish M. HUNDI, Cliff LA CROIX
  • Method for conditioning a ceramic coating
    Patent number: 11384430
    Abstract: A method for conditioning ceramic coating on a part for use in a plasma processing chamber is provided. The ceramic coating is wetted with a solution, wherein the solution is formed by mixing a solvent with an electrolyte, wherein from 1% to 10% of the electrolyte dissociates in the solution. The ceramic coating is blasted with particles. The ceramic coating is rinsed.
    Type: Grant
    Filed: July 1, 2019
    Date of Patent: July 12, 2022
    Assignee: Lam Research Corporation
    Inventors: Hong Shih, Xiaomin Bin, Duane Outka, Eric A. Pape, Gregory A. Pilgrim, Girish M. Hundi, Cliff La Croix
  • METHOD AND APPARATUS FOR MEASURING PARTICLES
    Publication number: 20210341377
    Abstract: An apparatus for measuring contamination on a critical surface of a part is provided. A vessel for mounting the part is provided. An inert gas source is in fluid connection with the vessel and adapted to provide an inert gas to the vessel. At least one diffuser receives the inert gas from the vessel, wherein the critical surface of the part is exposed to the inert gas when the part is mounted in the vessel. At least one analyzer is adapted to receive inert gas from the at least one diffuser and measures contaminants in the inert gas.
    Type: Application
    Filed: September 5, 2019
    Publication date: November 4, 2021
    Inventors: Amir A. YASSERI, Girish M. HUNDI, John Michael KERNS, Duane OUTKA, John DAUGHERTY, Cliff LA CROIX
  • METHOD FOR CONDITIONING A CERAMIC COATING
    Publication number: 20210280393
    Abstract: A method for conditioning ceramic coating on a part for use in a plasma processing chamber is provided. The ceramic coating is wetted with a solution, wherein the solution is formed by mixing a solvent with an electrolyte, wherein from 1% to 10% of the electrolyte dissociates in the solution. The ceramic coating is blasted with particles. The ceramic coating is rinsed.
    Type: Application
    Filed: July 1, 2019
    Publication date: September 9, 2021
    Inventors: Hong SHIH, Xiaomin BIN, Duane OUTKA, Eric A. PAPE, Gregory A. PILGRIM, Girish M. HUNDI, Cliff LA CROIX