Patents by Inventor Gisela Rissmann

Gisela Rissmann has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Transmitting optical element and objective for a microlithographic projection exposure apparatus
    Patent number: 8570488
    Abstract: A transmitting optical element adapted for use in an objective for a microlithographic projection exposure apparatus is composed of a polycrystalline material, with the polycrystalline material having crystallites with a cubic crystal structure, and with the mean crystallite size of these crystallites being at least micrometers, and at most micrometers.
    Type: Grant
    Filed: December 8, 2005
    Date of Patent: October 29, 2013
    Assignee: Carl Zeiss SMT GmbH
    Inventors: Wilfried Clauss, Michael Totzeck, Gisela Rissmann
  • TRANSMITTING OPTICAL ELEMENT AND OBJECTIVE FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
    Publication number: 20090201478
    Abstract: A transmitting optical element (33, 37) adapted for use in an objective for a microlithographic projection exposure apparatus is composed of a polycrystalline material (100), with the polycrystalline material (100) having crystallites (102) with a cubic crystal structure, and with the mean crystallite size of these crystallites (102) being at least (0.5) micrometers, and at most (100) micrometers.
    Type: Application
    Filed: December 8, 2005
    Publication date: August 13, 2009
    Applicant: CARL ZEISS SMT AG
    Inventors: Wilfried Clauss, Michael Totzeck, Werner Mueller-Rissmann, Gisela Rissmann