Patents by Inventor Gisela Schammler

Gisela Schammler has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8513080
    Abstract: In sophisticated approaches for forming high-k metal gate electrode structures in an early manufacturing stage, a threshold adjusting semiconductor alloy may be deposited on the basis of a selective epitaxial growth process without affecting the back side of the substrates. Consequently, any negative effects, such as contamination of substrates and process tools, reduced surface quality of the back side and the like, may be suppressed or reduced by providing a mask material and preserving the material at least during the selective epitaxial growth process.
    Type: Grant
    Filed: September 20, 2011
    Date of Patent: August 20, 2013
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Stephan Kronholz, Berthold Reimes, Richard Carter, Fernando Koch, Gisela Schammler
  • Publication number: 20120009751
    Abstract: In sophisticated approaches for forming high-k metal gate electrode structures in an early manufacturing stage, a threshold adjusting semiconductor alloy may be deposited on the basis of a selective epitaxial growth process without affecting the back side of the substrates. Consequently, any negative effects, such as contamination of substrates and process tools, reduced surface quality of the back side and the like, may be suppressed or reduced by providing a mask material and preserving the material at least during the selective epitaxial growth process.
    Type: Application
    Filed: September 20, 2011
    Publication date: January 12, 2012
    Inventors: Stephan Kronholz, Berthold Reimes, Richard Carter, Fernando Koch, Gisela Schammler
  • Patent number: 8048748
    Abstract: In sophisticated approaches for forming high-k metal gate electrode structures in an early manufacturing stage, a threshold adjusting semiconductor alloy may be deposited on the basis of a selective epitaxial growth process without affecting the back side of the substrates. Consequently, any negative effects, such as contamination of substrates and process tools, reduced surface quality of the back side and the like, may be suppressed or reduced by providing a mask material and preserving the material at least during the selective epitaxial growth process.
    Type: Grant
    Filed: October 29, 2010
    Date of Patent: November 1, 2011
    Assignee: GLOBALFOUNDRIES Inc.
    Inventors: Stephan Kronholz, Berthold Reimer, Richard Carter, Fernando Koch, Gisela Schammler
  • Publication number: 20110189831
    Abstract: In sophisticated approaches for forming high-k metal gate electrode structures in an early manufacturing stage, a threshold adjusting semiconductor alloy may be deposited on the basis of a selective epitaxial growth process without affecting the back side of the substrates. Consequently, any negative effects, such as contamination of substrates and process tools, reduced surface quality of the back side and the like, may be suppressed or reduced by providing a mask material and preserving the material at least during the selective epitaxial growth process.
    Type: Application
    Filed: October 29, 2010
    Publication date: August 4, 2011
    Inventors: Stephan Kronholz, Berthold Reimer, Richard Carter, Fernando Koch, Gisela Schammler
  • Patent number: 6894390
    Abstract: A semiconductor device comprises a material layer adapted to efficiently stop alpha particles that are substantially generated within a solder bump of a flip chip device. The materials used for stopping the alpha particles are compatible with standard back-end processing and do not degrade adhesion of the solder bump to the remaining substrate. Moreover, a low electrical resistance is maintained and heat dissipation may be improved.
    Type: Grant
    Filed: August 27, 2003
    Date of Patent: May 17, 2005
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Gisela Schammler, Mathias Böttcher, Frank Kuechenmeister, Daniel Gehre, Ehrenfried Zschech
  • Publication number: 20040164409
    Abstract: A semiconductor device comprises a material layer adapted to efficiently stop alpha particles that are substantially generated within a solder bump of a flip chip device. The materials used for stopping the alpha particles are compatible with standard back-end processing and do not degrade adhesion of the solder bump to the remaining substrate. Moreover, a low electrical resistance is maintained and heat dissipation may be improved.
    Type: Application
    Filed: August 27, 2003
    Publication date: August 26, 2004
    Inventors: Gisela Schammler, Mathias Bottcher, Frank Kuechenmeister, Daniel Gehre, Ehrenfried Zschech
  • Patent number: 6639314
    Abstract: A solder bump structure and a method for forming the same are disclosed. Over a contact pad a first and a second metal film are deposited, wherein the second metal film is patterned prior to the deposition of a solder bump material such that an opening isolates an inner region of the second metal film from an outer region of the second metal film. The solder material deposited on the inner region and, at least partially, in the opening serves as an etch stop for a subsequent removal of the outer region.
    Type: Grant
    Filed: April 25, 2002
    Date of Patent: October 28, 2003
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Mathias Boettcher, Gisela Schammler, Frank Kuechenmeister
  • Publication number: 20030052415
    Abstract: A solder bump structure and a method for forming the same are disclosed. Over a contact pad a first and a second metal film are deposited, wherein the second metal film is patterned prior to the deposition of a solder bump material such that an opening isolates an inner region of the second metal film from an outer region of the second metal film. The solder material deposited on the inner region and, at least partially, in the opening serves as an etch stop for a subsequent removal of the outer region.
    Type: Application
    Filed: April 25, 2002
    Publication date: March 20, 2003
    Inventors: Mathias Boettcher, Gisela Schammler, Frank Kuechenmeister