Abstract: A deformable mirror element with a high natural frequency has elongate ribbons attached along a longitudinal portion thereof to a support. The ribbon is transversely slit to divide each ribbon into at least two individual wing portions. The wing portions extend laterally from the support and are capable of deforming in response to a force applied to the wing. The deformable mirror element is used in a light valve for modulating one or more beams of incident light. The high natural frequency of the element ensures that the light valve is useful in applications requiring fast response time.

Abstract: A deformable mirror element with a high natural frequency has elongate ribbons attached along a longitudinal portion thereof to a support. A reflective wing portion extends laterally from the support and is capable of deforming in response to a force applied to the wing. The deformable mirror element is used in a light valve for modulating one or more beams of light. The high natural frequency of the element ensures that the light valve is useful in applications requiring fast response time.

Abstract: A deformable mirror element with a high natural frequency has elongate ribbons attached along a longitudinal portion thereof to a support. A reflective wing portion extends laterally from the support and is capable of deforming in response to a force applied to the wing. The deformable mirror element is used in a light valve for modulating one or more beams of light. The high natural frequency of the element ensures that the light valve is useful in applications requiring fast response time.

Abstract: A deformable mirror element with a high natural frequency has elongate ribbons attached along a longitudinal portion thereof to a support. The ribbon is transversely slit to divide each ribbon into at least two individual wing portions. The wind portions extend laterally from the support and are capable of deforming in response to a force applied to the wing. The deformable mirror element is used in a light valve for modulating one or more beams of incident light. The high natural frequency of the element ensures that the light valve is useful in applications requiring fast response time.

Abstract: In accordance with the present invention, an array of individually addressable micromachined light reflecting ribbons provide a high speed light valve action by employing a method in accordance with which the ribbons flex about their longer axis under the action of an applied electrostatic field. The ribbons are mounted on pedestals such that the resulting micromechanical structures are substantially symmetrical with respect to a plane along their long axis through the centers of the pedestals and normal to the substrate. This micromechanical arrangement ensures a structure with a high natural frequency, thereby allowing high light valve switching speeds. The particular mode of deformation also ensures a robust structure. The method may be applied in either “bright field” or “dark field” (Schlieren) mode. The particular combination of materials employed allows the method to be used in higher incident power applications such as those encountered in the printing industry.

Abstract: In accordance with the present invention, an array of individually addressable micromachined light reflecting ribbons provide a high speed light valve action by employing a method in accordance with which the ribbons flex about their longer axis under the action of an applied electrostatic field. The ribbons are mounted on pedestals such that the resulting micromechanical structures are substantially symmetrical with respect to a plane along their long axis through the centers of the pedestals and normal to the substrate. This micromechanical arrangement ensures a structure with a high natural frequency, thereby allowing high light valve switching speeds. The particular mode of deformation also ensures a robust structure. The method may be applied in either “bright field” or “dark field” (Schlieren) mode. The particular combination of materials employed allows the method to be used in higher incident power applications such as those encountered in the printing industry.