Abstract: Porous ceramic and hybrid ceramic films are useful as low dielectric constant interlayers in semiconductor interconnects. (Hybrid ceramic films are defined as films that contain organic and ceramic molecular components in the structure, as, for example, organosilicates). This invention describes the usefulness of humidity treatments (using specific temperature/humidity treatments as illustrative examples) in increasing mechanical integrity of porous dielectric films with minimal detrimental effect on film porosity or dielectric constant and with no adverse impact on film quality. The efficacy of such treatments is illustrated using surfactant-templated mesoporous silicate films as an example. This invention also describes a specific family of additives to be used with highly pure alkali-metal-free ceramic and hybrid precursors for such dielectric films that will enable better control of the film porosity and quality and lower dielectric constants with the required mechanical integrity.

Abstract: A method of forming complex three-dimensional microstructures wherein an external stimulus is applied to a first layer of a photosensitive material, thereby creating voids in the first layer, and any material present in those voids is removed. A sacrificial material is then provided within at least a portion of the voids. This sacrificial layer fills the voids, either in whole or in part, and enables a second layer of photosensitive material to be stacked upon the first, while still preserving the pattern formed in the first layer. Once the sacrificial layer has been applied, a second layer of photosensitive material may then be stacked onto the first. Successive layers of photosensitive material and sacrificial material may be added until a final, complex three-dimensional structure is created. The sacrificial material may then be removed with a solvent such as carbon dioxide.

Abstract: One embodiment of the present invention includes a flowcell with an inlet and an outlet in fluid communication with a cavity that is effective to receive a fluid flow from the inlet and to discharge at least a portion of that fluid flow through the outlet. The flowcell further includes a structure extending across the cavity to divide the fluid flow, which includes a magnetic material to capture magnetically attractable material in the fluid flow. The system further includes a sensor arranged to detect an optical property of the magnetically attractable material while captured in the cavity.

Abstract: A method of forming complex three-dimensional microstructures wherein an external stimulus is applied to a first layer of a photosensitive material, thereby creating voids in the first layer, and any material present in those voids is removed. A sacrificial material is then provided within at least a portion of the voids. This sacrificial layer fills the voids, either in whole or in part, and enables a second layer of photosensitive material to be stacked upon the first, while still preserving the pattern formed in the first layer. Once the sacrificial layer has been applied, a second layer of photosensitive material may then be stacked onto the first. Successive layers of photosensitive material and sacrificial material may be added until a final, complex three-dimensional structure is created. The sacrificial material may then be removed with a solvent such as carbon dioxide.

Abstract: A preferred embodiment of this invention is illustrated in FIG. 4 showing an offset and tilted object transducer 50 being rotated about a system axis 51 to sequentially insonify the object from various acute incident angles .theta. to the system axis to provide images of the out-of-focus structures at spaced locations at the hologram detection surface 18 at different spaced times. If the pulse rate of the object transducer is greater than the fusion of the eye, the eye is able to average two or more images into a single perceived image. Likewise, video equipment that receives images at a rate greater than 30 Hertz will average two or more images and display the image at a rate of approximately 30 Hertz. Additionally, external video processing may be utilized to electronically average two or more images electronically to obtain an averaged image at any time constant desired by the operator.