Patents by Inventor Glen C. Hillier

Glen C. Hillier has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for manufacturing semiconductor wafers
    Patent number: 5221356
    Abstract: Apparatus for semiconductor wafer manufacture in which a susceptor has an annular rotor for supporting a wafer substrate with a substrate surface facing downwards. The rotor has an annular flange overlying a body of the susceptor and the structure is such that a flow of rotor driving gas may be directed up from the body and against the flange while crystalline layers are being formed on the undersurface of the substrate.
    Type: Grant
    Filed: October 8, 1992
    Date of Patent: June 22, 1993
    Assignee: Northern Telecom Limited
    Inventors: Glen C. Hillier, Jurgen Becker