Patents by Inventor Glen J. Pettibone

Glen J. Pettibone has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Hydrogen peroxide abatement of metal hydride fumes
    Patent number: 7294320
    Abstract: A method and apparatus for reducing the level of metal hydride found in effluent of a process chamber is disclosed. The method includes introducing hydrogen peroxide into the process chamber to react with metal hydride and reduce the level of metal hydride to a level under a permissible exposure limit. Additionally, an apparatus having a process chamber and a vaporizing device for introducing hydrogen peroxide into the process chamber is disclosed.
    Type: Grant
    Filed: September 17, 2004
    Date of Patent: November 13, 2007
    Assignee: Applied Materials, Inc.
    Inventor: Glen J. Pettibone