Patents by Inventor Glen Jenkins

Glen Jenkins has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Preparation of high performance silica slurry using a centrifuge
    Patent number: 6802983
    Abstract: A method and system for separating impurities, such as large abrasive particles and foreign matter from an abrasive polishing slurry prior to a Chemical Mechanical Polishing (CMP) procedure performed on a surface of a semiconductor wafer. Impurities greater than about 25 microns are removed by an initial filtration process. The filtrate is then introduced to a solid bowl, sedimentation-type centrifuge to remove particles greater than 0.5 microns thereby providing a polishing slurry for final utilization in a CMP procedure that reduces damage to the surface of the polished semiconductor wafer.
    Type: Grant
    Filed: September 17, 2001
    Date of Patent: October 12, 2004
    Assignee: Advanced Technology Materials, Inc.
    Inventors: William Mullee, Glen Jenkins, Michael Jones