Patents by Inventor Glen R. Gilchrist

Glen R. Gilchrist has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD AND APPARATUS FOR CLEANING RESIDUE FROM AN ION SOURCE COMPONENT
    Publication number: 20130305989
    Abstract: Some techniques disclosed herein facilitate cleaning residue from a molecular beam component. For example, in an exemplary method, a molecular beam is provided along a beam path, causing residue build up on the molecular beam component. To reduce the residue, the molecular beam component is exposed to a hydro-fluorocarbon plasma. Exposure to the hydro-fluorocarbon plasma is ended based on whether a first predetermined condition is met, the first predetermined condition indicative of an extent of removal of the residue. Other methods and systems are also disclosed.
    Type: Application
    Filed: July 23, 2013
    Publication date: November 21, 2013
    Applicant: Axcelis Technologies, Inc.
    Inventors: Aseem K. Srivastava, William F. DiVergilio, Glen R. Gilchrist
  • METHOD AND APPARATUS FOR CLEANING RESIDUE FROM AN ION SOURCE COMPONENT
    Publication number: 20110108058
    Abstract: Some techniques disclosed herein facilitate cleaning residue from a molecular beam component. For example, in an exemplary method, a molecular beam is provided along a beam path, causing residue build up on the molecular beam component. To reduce the residue, the molecular beam component is exposed to a hydro-fluorocarbon plasma. Exposure to the hydro-fluorocarbon plasma is ended based on whether a first predetermined condition is met, the first predetermined condition indicative of an extent of removal of the residue. Other methods and systems are also disclosed.
    Type: Application
    Filed: November 11, 2009
    Publication date: May 12, 2011
    Applicant: Axcelis Technologies, Inc.
    Inventors: Aseem K. Srivastava, William F. DiVergilio, Glen R. Gilchrist