Patents by Inventor Glen Wada

Glen Wada has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6943071
    Abstract: A nonvolatile memory cell comprising a pair of spaced apart shallow trench isolation regions formed in a substrate and defining a substrate active region. A tunnel dielectric is formed on the substrate active region. A floating gate is formed on the tunnel dielectric and is self aligned between the spaced apart shallow trench isolation regions. A dielectric layer is formed on the floating gate and a control gate formed on the dielectric layer. A source region and a drain region are formed in the substrate active region on opposite sides of the floating gate.
    Type: Grant
    Filed: June 3, 2002
    Date of Patent: September 13, 2005
    Assignee: Intel Corporation
    Inventors: Albert Fazio, Krishna Parat, Glen Wada, Neal Mielke, Rex Stone
  • Patent number: 6849896
    Abstract: A method for making a flash memory having a passivation layer that is not transparent to ultraviolet light. The method forming a semiconductor that includes flash memory cell having floating gate, then forming a the substrate. Process induced charge that has accumulated on the flash cell floating gate is then neutralized and a passivation layer, which is no transparent to ultraviolet light, is formed on the conductive layer.
    Type: Grant
    Filed: November 9, 2001
    Date of Patent: February 1, 2005
    Assignee: Intel Corporation
    Inventors: Glen Wada, Raghupathy V. Giridhar, Anthony Ozzello
  • Patent number: 6518618
    Abstract: A nonvolatile memory cell comprising a pair of spaced apart shallow trench isolation regions formed in a substrate and defining a substrate active region. A tunnel dielectric is formed on the substrate active region. A floating gate is formed on the tunnel dielectric and is self aligned between the spaced apart shallow trench isolation regions. A dielectric layer is formed on the floating gate and a control gate formed on the dielectric layer. A source region and a drain region are formed in the substrate active region on opposite sides of the floating gate.
    Type: Grant
    Filed: December 3, 1999
    Date of Patent: February 11, 2003
    Assignee: Intel Corporation
    Inventors: Albert Fazio, Krishna Parat, Glen Wada, Neal Mielke, Rex Stone
  • Publication number: 20020149050
    Abstract: A nonvolatile memory cell comprising a pair of spaced apart shallow trench isolation regions formed in a substrate and defining a substrate active region. A tunnel dielectric is formed on the substrate active region. A floating gate is formed on the tunnel dielectric and is self aligned between the spaced apart shallow trench isolation regions. A dielectric layer is formed on the floating gate and a control gate formed on the dielectric layer. A source region and a drain region are formed in the substrate active region on opposite sides of the floating gate.
    Type: Application
    Filed: June 3, 2002
    Publication date: October 17, 2002
    Inventors: Albert Fazio, Krishna Parat, Glen Wada, Neal Mielke, Rex Stone
  • Publication number: 20020094595
    Abstract: A method for making a flash memory having a passivation layer that is not transparent to ultraviolet light. The method comprises forming a semiconductor substrate that includes a flash memory cell having a floating gate, then forming a conductive layer on the substrate. Process induced charge that has accumulated on the flash cell floating gate is then neutralized and a passivation layer, which is not transparent to ultraviolet light, is formed on the conductive layer.
    Type: Application
    Filed: November 9, 2001
    Publication date: July 18, 2002
    Inventors: Glen Wada, R.V. Giridhar, Anthony Ozzello
  • Patent number: 6365521
    Abstract: A method of passivating an integrated circuit comprising providing an integrated circuit having a top side including a bond pad, depositing a first dielectric over said top side of said integrated circuit, exposing a first area portion of a top side of said bond pad, depositing a second dielectric of one of a material that is substantially impermeable to moisture over said top side of said integrated circuit, and exposing a second area portion of said top side of said bond pad, said second area portion within said first area portion is disclosed.
    Type: Grant
    Filed: December 31, 1997
    Date of Patent: April 2, 2002
    Assignee: Intel Corporation
    Inventors: Jan V. Shubert, Glen Wada, Mansour Moinpour, Yang-Chin Shih, Ken Schatz
  • Patent number: 6350651
    Abstract: A method for making a flash memory having a passivation layer that is not transparent to ultraviolet light. The method comprises forming a semiconductor substrate that includes a flash memory cell having a floating gate, then forming a conductive layer on the substrate. Process induced charge that has accumulated on the flash cell floating gate is then neutralized and a passivation layer, which is not transparent to ultraviolet light, is formed on the conductive layer.
    Type: Grant
    Filed: June 10, 1999
    Date of Patent: February 26, 2002
    Assignee: Intel Corporation
    Inventors: Glen Wada, R. V. Giridhar, Anthony Ozzello
  • Publication number: 20010024857
    Abstract: A method of fabricating a flash memory integrated circuit is described. In an embodiment of the present invention a dielectric filled trench isolation region is formed in a silicon substrate. The dielectric filled trench isolation region isolates a first portion of the silicon substrate from a second portion of the silicon substrate. A portion of the dielectric in the trench is then removed to reveal a portion of the silicon substrate in the trench between the first and second portions of the silicon substrate. Ions are then implanted to form a first source region in the first portion of the silicon substrate and to form a second source region in the second portion of the silicon substrate and to form a doped region in the revealed silicon substrate in the trench wherein the doped region in the trench extends from the first doped source region to the second doped source region.
    Type: Application
    Filed: May 23, 2001
    Publication date: September 27, 2001
    Inventors: Krishna Parat, Raghupathy V. Giridhar, Cheng C. Hu, Daniel Xu, Yudong Kim, Glen Wada
  • Patent number: 6265292
    Abstract: A method of fabricating a flash memory integrated circuit is described. In an embodiment of the present invention a dielectric filled trench isolation region is formed in a silicon substrate. The dielectric filled trench isolation region isolates a first portion of the silicon substrate from a second portion of the silicon substrate. A portion of the dielectric in the trench is then removed to reveal a portion of the silicon substrate in the trench between the first and second portions of the silicon substrate. Ions are then implanted to form a first source region in the first portion of the silicon substrate and to form a second source region in the second portion of the silicon substrate and to form a doped region in the revealed silicon substrate in the trench wherein the doped region in the trench extends from the first doped source region to the second doped source region.
    Type: Grant
    Filed: July 12, 1999
    Date of Patent: July 24, 2001
    Assignee: Intel Corporation
    Inventors: Krishna Parat, Raghupathy V. Giridhar, Cheng C. Hu, Daniel Xu, Yudong Kim, Glen Wada
  • Patent number: 5758095
    Abstract: A system and method for ordering and prescribing drugs for a patient. This system includes an improved process for facilitating and automating the process of drug order entry. The user may interact with the system in a variety of ways such as keyboard, mouse, pen-base entry or voice entry. The system includes a database containing medical prescribing and drug information which is both general and patient-specific. The system also permits the user to view current and previously prescribed medications for any patient. The system can alert the user to potentially adverse situations as a result of the prescribed medication based on information in the database. The system also can automatically determine product selection based on descriptions and can automatically communicate the order to a pharmacy. Further, the system includes a means for automatically displaying messages to the user relating to predetermined situations.
    Type: Grant
    Filed: February 24, 1995
    Date of Patent: May 26, 1998
    Inventors: David Albaum, Jeff Inokuchi, Denis Kitayama, Glen Wada, Ray Wong, Brian Komoto
  • Patent number: 4808259
    Abstract: A method for etching of metal-oxide-semiconductor (MOS) devices utilizing a multi-step power reduction plasma etching recipe to reduce ion bombardment damage on the resulting surface. The multi-step power reduction recipe allows for reasonable throughput of wafers due to a relatively high etch rate at the upper layers of the surface followed by progressively lower power corresponding lower etch rates at the lower levels of the surface. The etching process is followed by a cleaning process to remove metallic contamination resulting from the plasma etching process to yield an excellent surface for growing low defect density MOS gate oxides with high dielectric integrity.
    Type: Grant
    Filed: January 25, 1988
    Date of Patent: February 28, 1989
    Assignee: Intel Corporation
    Inventors: Don W. Jillie, Jr., Gerald Yin, Glen Wada