Patents by Inventor Glenn A. Biery
Glenn A. Biery has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8383483Abstract: The present invention relates to complementary metal-oxide-semiconductor (CMOS) circuits that each contains at least a first and a second gate stacks. The first gate stack is located over a first device region (e.g., an n-FET device region) in a semiconductor substrate and comprises at least, from bottom to top, a gate dielectric layer, a metallic gate conductor, and a silicon-containing gate conductor. The second gate stack is located over a second device region (e.g., a p-FET device region) in the semiconductor substrate and comprises at least, from bottom to top, a gate dielectric layer and a silicon-containing gate conductor. The first and second gate stacks can be formed over the semiconductor substrate in an integrated manner by various methods of the present invention.Type: GrantFiled: August 14, 2009Date of Patent: February 26, 2013Assignee: International Business Machines CorporationInventors: John C. Arnold, Glenn A. Biery, Alessandro C. Callegari, Tze-Chiang Chen, Michael P. Chudzik, Bruce B. Doris, Michael A. Gribelyuk, Young-Hee Kim, Barry P. Linder, Vijay Narayanan, Joseph S. Newbury, Vamsi K. Paruchuri, Michelle L. Steen
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Patent number: 8178433Abstract: An advanced gate structure that includes a fully silicided metal gate and silicided source and drain regions in which the fully silicided metal gate has a thickness that is greater than the thickness of the silicided source/drain regions is provided. Methods of forming the advanced gate structure are also provided.Type: GrantFiled: October 7, 2008Date of Patent: May 15, 2012Assignee: International Business Machines CorporationInventors: Glenn A. Biery, Michelle L. Steen
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Patent number: 7705405Abstract: An advanced gate structure that includes a fully silicided metal gate and silicided source and drain regions in which the fully silicided metal gate has a thickness that is greater than the thickness of the silicided source/drain regions is provided. Methods of forming the advanced gate structure are also provided.Type: GrantFiled: July 6, 2004Date of Patent: April 27, 2010Assignee: International Business Machines CorporationInventors: Glenn A. Biery, Michelle L. Steen
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Publication number: 20100041221Abstract: The present invention relates to complementary metal-oxide-semiconductor (CMOS) circuits that each contains at least a first and a second gate stacks. The first gate stack is located over a first device region (e.g., an n-FET device region) in a semiconductor substrate and comprises at least, from bottom to top, a gate dielectric layer, a metallic gate conductor, and a silicon-containing gate conductor. The second gate stack is located over a second device region (e.g., a p-FET device region) in the semiconductor substrate and comprises at least, from bottom to top, a gate dielectric layer and a silicon-containing gate conductor. The first and second gate stacks can be formed over the semiconductor substrate in an integrated manner by various methods of the present invention.Type: ApplicationFiled: August 14, 2009Publication date: February 18, 2010Applicant: International Business Machines CoporationInventors: John C. Arnold, Glenn A. Biery, Alessandro C. Callegari, Tze-Chiang Chen, Michael P. Chudzik, Bruce B. Doris, Michael A. Gribelyuk, Young-Hee Kim, Barry P. Linder, Vijay Narayanan, Joseph S. Newbury, Vamsi K. Paruchuri, Michelle L. Steen
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Publication number: 20090029515Abstract: An advanced gate structure that includes a fully silicided metal gate and silicided source and drain regions in which the fully silicided metal gate has a thickness that is greater than the thickness of the silicided source/drain regions is provided. Methods of forming the advanced gate structure are also provided.Type: ApplicationFiled: October 7, 2008Publication date: January 29, 2009Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATIONInventors: Glenn A. Biery, Michelle L. Steen
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Patent number: 7473975Abstract: A method for forming a semiconductor device structure, comprising the steps of independently forming source/drain surface metal silicide layers and a fully silicided metal gate in a polysilicon gate stack. Specifically, one or more sets of spacer structures are provided along sidewalls of the polysilicon gate stack after formation of the source/drain surface metal silicide layers and before formation of the silicided metal gate, in order to prevent formation of additional metal silicide structures in the source/drain regions during the gate salicidation process. The resulting semiconductor device structure includes a fully silicide metal gate that either comprises a different metal silicide material from that in the source/drain surface metal silicide layers, or has a thickness that is larger than that of the source/drain surface metal silicide layers. The source/drain regions of the semiconductor device structure are devoid of other metal silicide structures besides the surface metal silicide layers.Type: GrantFiled: August 17, 2007Date of Patent: January 6, 2009Assignee: International Business Machines CorporationInventors: Glenn A. Biery, Ghavam Shahidi, Michelle L. Steen
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Patent number: 7273777Abstract: A method for forming a semiconductor device structure, comprising the steps of independently forming source/drain surface metal silicide layers and a fully silicided metal gate in a polysilicon gate stack. Specifically, one or more sets of spacer structures are provided along sidewalls of the polysilicon gate stack after formation of the source/drain surface metal silicide layers and before formation of the silicided metal gate, in order to prevent formation of additional metal silicide structures in the source/drain regions during the gate salicidation process. The resulting semiconductor device structure includes a fully silicide metal gate that either comprises a different metal silicide material from that in the source/drain surface metal silicide layers, or has a thickness that is larger than that of the source/drain surface metal silicide layers. The source/drain regions of the semiconductor device structure are devoid of other metal silicide structures besides the surface metal silicide layers.Type: GrantFiled: August 2, 2005Date of Patent: September 25, 2007Assignee: International Business Machines CorporationInventors: Glenn A. Biery, Ghavam Shahidi, Michelle L. Steen
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Patent number: 7135398Abstract: An advanced back-end-of-line (BEOL) interconnect structure having a hybrid dielectric is disclosed. The inter-layer dielectric (ILD) for the via level is preferably different from the ILD for the line level. In a preferred embodiment, the via-level ILD is formed of a low-k SiCOH material, and the line-level ILD is formed of a low-k polymeric thermoset material.Type: GrantFiled: July 29, 2004Date of Patent: November 14, 2006Assignee: International Business Machines CorporationInventors: John A. Fitzsimmons, Stephen E. Greco, Jia Lee, Stephen M. Gates, Terry Spooner, Matthew S. Angyal, Habib Hichri, Theordorus E. Standaert, Glenn A. Biery
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Patent number: 7034400Abstract: A metallization insulating structure, having a substrate; a substantially fluorine free insulating layer formed on the substrate, having a height, hi; a fluorine containing insulating layer formed on the substantially fluorine free insulating layer, having a height hf.Type: GrantFiled: September 10, 2003Date of Patent: April 25, 2006Assignee: International Business Machines CorporationInventors: Edward P. Barth, Glenn A. Biery, Jeffrey P. Gambino, Thomas H. Ivers, Hyun K. Lee, Ernest N. Levine, Ann McDonald, Anthony K. Stamper
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Patent number: 6933191Abstract: MIM capacitors and thin film resistors are fabricated with at least one less lithographic step than the prior art methods. The process step reduction is realized by using semi-transparent metallic electrodes, fabricated with a two-mask process, which provides for direct alignment, and eliminates the need for alignment trenches in an additional layer.Type: GrantFiled: September 18, 2003Date of Patent: August 23, 2005Assignee: International Business Machines CorporationInventors: Glenn A. Biery, Zheng G. Chen, Timothy J. Dalton, Naftali E. Lustig
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Patent number: 6917108Abstract: An advanced back-end-of-line (BEOL) interconnect structure having a hybrid dielectric is disclosed. The inter-layer dielectric (ILD) for the via level is preferably different from the ILD for the line level. In a preferred embodiment, the via-level ILD is formed of a low-k SiCOH material, and the line-level ILD is formed of a low-k polymeric thermoset material.Type: GrantFiled: November 14, 2002Date of Patent: July 12, 2005Assignee: International Business Machines CorporationInventors: John A. Fitzsimmons, Stephen E. Greco, Jia Lee, Stephen M. Gates, Terry Spooner, Matthew S. Angyal, Habib Hichri, Theordorus E. Standaert, Glenn A. Biery
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Publication number: 20040094839Abstract: An advanced back-end-of-line (BEOL) interconnect structure having a hybrid dielectric is disclosed. The inter-layer dielectric (ILD) for the via level is preferably different from the ILD for the line level. In a preferred embodiment, the via-level ILD is formed of a low-k SiCOH material, and the line-level ILD is formed of a low-k polymeric thermoset material.Type: ApplicationFiled: November 14, 2002Publication date: May 20, 2004Applicant: International Business Machines CorporationInventors: John A. Fitzsimmons, Stephen E. Greco, Jia Lee, Stephen M. Gates, Terry Spooner, Matthew S. Angyal, Habib Hichri, Theordorus E. Standaert, Glenn A. Biery
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Publication number: 20040061235Abstract: A metallization insulating structure, havingType: ApplicationFiled: September 10, 2003Publication date: April 1, 2004Inventors: Edward P. Barth, Glenn A. Biery, Jeffrey P. Gambino, Thomas H. Ivers, Hyun K. Lee, Ernest N. Levine, Ann McDonald, Anthony K. Stamper
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Patent number: 5952674Abstract: An integrated circuit wafer topography monitor is disclosed for sensing mis-processing in the fabrication of integrated circuits. In particular, the monitor senses unacceptable variations in layer planarity resulting from over polishing, over etching, scratches and mishandling. The topography monitor may be placed within the chip active area, the chip kerf area or in unutilized areas of the wafer such as a partial chip site. The monitor is formed when, first a conformal insulator is deposited over the topography of interest. Then, runs of wire are formed in the conformal insulator by a damascene or similar process. The wire runs are formed directly above the topography of interest. A puddle of metal is formed corresponding to any unacceptably non-planar topography. The puddle electrically couples the wires together. This effects a change in the metal runs which may be sensed as an electrical short or change in resistance.Type: GrantFiled: March 18, 1998Date of Patent: September 14, 1999Assignee: International Business Machines CorporationInventors: Daniel C. Edelstein, Glenn A. Biery
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Patent number: 5563517Abstract: A test system having an improved physical layout and electrical design allows the 1/f noise of metal interconnects to be measured at levels close to that of Johnson or thermal noise. A detailed description of examples of operation of the test system provides evidence of the effectiveness of the test system in minimizing system noise to a level significantly lower than Johnson noise. This permits quantitative measurment of the noise contribution attributable to variations in cross-sectional area of connections for various applications and for qualitative prediction of electromigration lifetimes of metal films, particularly aluminum, having different microstructures. The test system includes an enclosure which includes several nested groups of housings including a sample oven within a device under test box which is, in turn, contained within the system enclosure.Type: GrantFiled: May 16, 1995Date of Patent: October 8, 1996Assignee: International Business Machines CorporationInventors: Glenn A. Biery, Daniel M. Boyne, Kenneth P. Rodbell, Richard G. Smith, Michael H. Wood
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Patent number: 5470788Abstract: A method of providing interconnections to a semiconductor integrated chip designed to eliminate electromigration. The method includes the steps of forming an interconnection with segments of Al interspersed with segments of a refractory metal, wherein each aluminum segments is followed by a segment of refractory metal, aligning the aluminum and refractory metal segments with respect to each other ensuring electrical continuity.Type: GrantFiled: February 28, 1994Date of Patent: November 28, 1995Assignee: International Business Machines CorporationInventors: Glenn A. Biery, Daniel M. Boyne, Hormazdyar M. Dalal
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Patent number: 5434385Abstract: A test system having an improved physical layout and electrical design allows the 1/f noise of metal interconnects to be measured at levels close to that of Johnson or thermal noise. A detailed description of examples of operation of the test system provides evidence of the effectiveness of the test system in minimizing system noise to a level significantly lower than Johnson noise. This permits quantitative measurment of the noise contribution attributable to variations in cross-sectional area of connections for various applications and for qualitative prediction of electromigration lifetimes of metal films, particularly aluminum, having different microstructures. The test system includes an enclosure which includes several nested groups of housings including a sample oven within a device under test box which is, in turn, contained within the system enclosure.Type: GrantFiled: November 2, 1992Date of Patent: July 18, 1995Assignee: International Business Machines CorporationInventors: Glenn A. Biery, Daniel M. Boyne, Kenneth P. Rodbell, Richard G. Smith, Michael H. Wood