Patents by Inventor Glenn A. Roberson

Glenn A. Roberson has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process and apparatus for precise volumetric diluting/mixing of chemicals
    Patent number: 5370269
    Abstract: Apparatus and method for accurate measuring and mixing of chemicals is disclosed. The apparatus includes one or more metered vessels having a container of predetermined volume and at least one constricted vent tube therein. By mounting a sensor on the constricted vent tube, a greatly amplified measurement of the precise chemical volume in the metered vessel is provided. The apparatus and method of the present invention readily lends itself to a variety of applications and can be adapted to handle virtually any form of chemical mixing, diluting, or generating process.
    Type: Grant
    Filed: March 22, 1993
    Date of Patent: December 6, 1994
    Assignee: Applied Chemical Solutions
    Inventors: Eugene W. Bernosky, J. Tobin Geatz, Edward T. Ferri, Jr., Glenn A. Roberson, Jr.
  • Vapor device and method for drying articles such as semiconductor wafers with substances such as isopropyl alcohol
    Patent number: 5315766
    Abstract: A device for drying articles such as semiconductor wafers comprising a vacuum process chamber for holding articles to be dried; a vapor generator substantially isolated from the process chamber for supplying a substance such as isopropyl alcohol in vapor form to the process chamber; a heater for heating the walls of the process chamber to discourage the substance vapor from condensing on the inside walls of the process chamber. The device can also be used for rinsing and cleansing articles prior to drying.
    Type: Grant
    Filed: May 22, 1992
    Date of Patent: May 31, 1994
    Assignee: Semifab Incorporated
    Inventors: Glenn A. Roberson, Jr., Robert B. Eglinton
  • Vapor device and method for drying articles such as semiconductor wafers with substances such as isopropyl alcohol
    Patent number: 5115576
    Abstract: A device for drying articles such as semiconductor wafers comprising a vacuum process chamber for holding articles to be dried; a vapor generator substantially isolated from the process chamber for supplying a substance such as isopropyl alcohol in vapor form to the process chamber; a heater for heating the walls of the process chamber to discourage the substance vapor from condensing on the inside walls of the process chamber. The device can also be used for rinsing and cleansing articles prior to drying.
    Type: Grant
    Filed: September 26, 1990
    Date of Patent: May 26, 1992
    Assignee: Semifab Incorporated
    Inventors: Glenn A. Roberson, Jr., Robert B. Eglinton
  • Vapor device and method for drying articles such as semiconductor wafers with substances such as isopropyl alcohol
    Patent number: 4977688
    Abstract: A device for drying articles such as semiconductor wafers comprising a vacuum process chamber for holding articles to be dried; a vapor generator substantially isolated from the process chamber for supplying a substance such as isopropyl alcohol in vapor form to the process chamber; a heater for heating the walls of the process chamber to discourage the substance vapor from condensing on the inside walls of the process chamber. The device can also be used for rinsing and cleansing articles prior to drying.
    Type: Grant
    Filed: October 27, 1989
    Date of Patent: December 18, 1990
    Assignee: Semifab Incorporated
    Inventors: Glenn A. Roberson, Jr., Robert B. Eglinton