Patents by Inventor Glenn Allen Cerny

Glenn Allen Cerny has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • H:SiOC coated substrates
    Patent number: 6667553
    Abstract: This invention pertains to a method for producing hydrogenated silicon oxycarbide (H:SiOC) films having low dielectric constant and a light transmittance of 95% or more for light with a wavelength in the range of 400 nm to 800 nm. The method comprises reacting a methyl-containing silane in a controlled oxygen environment using plasma enhanced or ozone assisted chemical vapor deposition to produce the films. Because of the transmittance the resulting films are useful in the formation of display devices.
    Type: Grant
    Filed: November 21, 2001
    Date of Patent: December 23, 2003
    Assignee: Dow Corning Corporation
    Inventors: Glenn Allen Cerny, Byung Keun Hwang, Mark Jon Loboda
  • H:SiOC coated substrates
    Publication number: 20030111662
    Abstract: This invention pertains to a method for producing hydrogenated silicon oxycarbide (H:SiOC) films having low dielectric constant and a light transmittance of 95% or more for light with a wavelength in the range of 400 nm to 800 nm. The method comprises reacting a methyl-containing silane in a controlled oxygen environment using plasma enhanced or ozone assisted chemical vapor deposition to produce the films. Because of the transmittance the resulting films are useful in the formation of display devices.
    Type: Application
    Filed: November 21, 2001
    Publication date: June 19, 2003
    Inventors: Glenn Allen Cerny, Byung Keun Hwang, Mark Jon Loboda