Patents by Inventor Glenn Baldwin Alers

Glenn Baldwin Alers has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Deposition and annealing of multicomponent ZrSnTi and HfSnTi oxide thin films using solventless liquid mixture of precursors
    Patent number: 6500499
    Abstract: Complex mixed metal containing thin films can be deposited by CVD from liquid mixtures of metal complexes without solvent by direct liquid injection and by other precursor dispersing method such as aerosol delivery with subsequent annealing to improve electrical properties of the deposited films. This process has potential for commercial success in microelectronics device fabrication of dielectrics, ferroelectrics, barrier metals/electrodes, superconductors, catalysts, and protective coatings. Application of this process, particularly the CVD of ZrSnTiOx (zirconium tin titanate, or ZTT) and HfSnTiOx (hafnium tin titanate, or HTT) thin films has been studied successfully.
    Type: Grant
    Filed: March 10, 2000
    Date of Patent: December 31, 2002
    Assignee: Air Products and Chemicals, Inc.
    Inventors: Yoshihide Senzaki, Arthur Kenneth Hochberg, David Allen Roberts, John Anthony Thomas Norman, Glenn Baldwin Alers, Robert McLemore Fleming
  • Detecting defects in integrated circuits
    Patent number: 6043662
    Abstract: The breakdown of an ultra-thin dielectric layer is detected by applying a test signal to the layer. Measurements are taken of noise signals present in the layer during the application of the test signal. At breakdown, a significant increase occurs in the amplitude of the measured noise signals. Similarly, fluctuations in quiescent current, I.sub.DDQ, (I.sub.DDQ noise signals), rather than the values of I.sub.DDQ, are utilized during testing as the basis for detecting defects in integrated circuits.
    Type: Grant
    Filed: January 2, 1998
    Date of Patent: March 28, 2000
    Inventors: Glenn Baldwin Alers, Kathleen Susan Krisch, Bonnie Elaine Weir
  • Detecting breakdown in dielectric layers
    Patent number: 5804975
    Abstract: The breakdown of an ultra-thin dielectric layer is detected by applying a test signal to the layer. Measurements are taken of noise signals present in the layer during the application of the test signal. At breakdown, a significant increase occurs in the amplitude of the measured noise signals.
    Type: Grant
    Filed: September 18, 1996
    Date of Patent: September 8, 1998
    Assignee: Lucent Technologies Inc.
    Inventors: Glenn Baldwin Alers, Kathleen Susan Krisch, Bonnie Elaine Weir