Patents by Inventor Glenn D. Alexander

Glenn D. Alexander has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of and apparatus for controlling thermal gradient in a load lock chamber
    Patent number: 5228208
    Abstract: After a heated object such as a processed wafer is placed inside a load lock chamber in a vacuum condition, a specified limited amount of vent gas is introduced and the pressure inside the chamber is maintained at an intermediate level for a specified length of time so a to control its thermal gradient. After the specified length of time, the chamber is completely vented. Both software and hardware implementations are possible for this staged vent.
    Type: Grant
    Filed: July 28, 1992
    Date of Patent: July 20, 1993
    Assignee: Applied Materials, Inc.
    Inventors: Gregory W. White, Glenn D. Alexander