Patents by Inventor Glenn D. Kublak

Glenn D. Kublak has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Cluster beam targets for laser plasma extreme ultraviolet and soft x-ray sources
    Patent number: 5577092
    Abstract: Method and apparatus for producing extreme ultra violet (EUV) and soft x-ray radiation from an ultra-low debris plasma source are disclosed. Targets are produced by the free jet expansion of various gases through a temperature controlled nozzle to form molecular clusters. These target clusters are subsequently irradiated with commercially available lasers of moderate intensity (10.sup.11 -10.sup.12 watts/cm.sup.2) to produce a plasma radiating in the region of 0.5 to 100 nanometers. By appropriate adjustment of the experimental conditions the laser focus can be moved 10-30 mm from the nozzle thereby eliminating debris produced by plasma erosion of the nozzle.
    Type: Grant
    Filed: January 25, 1995
    Date of Patent: November 19, 1996
    Inventors: Glenn D. Kublak, Martin C. Richardson