Patents by Inventor Glenn Florence

Glenn Florence has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Computer-implemented methods for determining if actual defects are potentially systematic defects or potentially random defects
    Patent number: 7975245
    Abstract: Various computer-implemented methods for determining if actual defects are potentially systematic defects or potentially random defects are provided. One computer-implemented method for determining if actual defects are potentially systematic defects or potentially random defects includes comparing a number of actual defects in a group to a number of randomly generated defects in a group. The actual defects are detected on a wafer. A portion of a design on the wafer proximate a location of each of the actual defects in the group and each of the randomly generated defects in the group is substantially the same. The method also includes determining if the actual defects in the group are potentially systematic defects or potentially random defects based on results of the comparing step.
    Type: Grant
    Filed: August 20, 2008
    Date of Patent: July 5, 2011
    Assignee: KLA-Tencor Corp.
    Inventors: Glenn Florence, Allen Park, Peter Rose
  • COMPUTER-IMPLEMENTED METHODS FOR DETERMINING IF ACTUAL DEFECTS ARE POTENTIALLY SYSTEMATIC DEFECTS OR POTENTIALLY RANDOM DEFECTS
    Publication number: 20090055783
    Abstract: Various computer-implemented methods for determining if actual defects are potentially systematic defects or potentially random defects are provided. One computer-implemented method for determining if actual defects are potentially systematic defects or potentially random defects includes comparing a number of actual defects in a group to a number of randomly generated defects in a group. The actual defects are detected on a wafer. A portion of a design on the wafer proximate a location of each of the actual defects in the group and each of the randomly generated defects in the group is substantially the same. The method also includes determining if the actual defects in the group are potentially systematic defects or potentially random defects based on results of the comparing step.
    Type: Application
    Filed: August 20, 2008
    Publication date: February 26, 2009
    Applicant: KLA-TENCOR CORPORATION
    Inventors: Glenn Florence, Allen Park, Peter Rose