Patents by Inventor Glenn R. Corn

Glenn R. Corn has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Variable duty cycle, multiple frequency, plasma reactor
    Patent number: 4585516
    Abstract: A plasma reactor and a process for operating a plasma reactor are disclosed. The reactor comprises parallel plates in which one plate is connected to a source of high frequency signal and a second plate is connected to a source of low frequency signal. Control apparatus modulates one or both signals. In the process, the duty cycles of the modulating signals is controlled so that the signals overlap during at least a portion of their cycles.
    Type: Grant
    Filed: March 4, 1985
    Date of Patent: April 29, 1986
    Assignee: Tegal Corporation
    Inventors: Glenn R. Corn, Andreas G. Hegedus