Patents by Inventor Glenn Roy Hower

Glenn Roy Hower has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for making integrated circuits
    Patent number: 5700725
    Abstract: An improved apparatus and method for the manufacture of integrated circuits is disclosed. At least three protrusions extend from the wafer support susceptor. The protrusions slightly electrically decouple the wafer from the susceptor during plasma processing. The protrusions prevent gradual debris build-up on the susceptor from causing variation from lot-to-lot in plasma processing results.
    Type: Grant
    Filed: January 29, 1997
    Date of Patent: December 23, 1997
    Assignee: Lucent Technologies Inc.
    Inventors: Glenn Roy Hower, Henry Y. Kumagai