Abstract: According to one embodiment, a micro-electrical mechanical system apparatus includes (i) a comb drive actuator having at least one irregularly shaped finger and (ii) a movable Fabry-Perot filter cavity mirror coupled to the comb drive actuator. According to some embodiments, a relationship between a voltage applied to the comb drive actuator and an amount of displacement associated with the movable mirror is substantially linear.

Abstract: According to some embodiments, a micro-electrical mechanical system apparatus includes an actuator within a plane and at least one movable mirror oriented substantially normal to the plane. The actuator may move the movable mirror with respect to a fixed mirror oriented substantially normal to the plane and substantially parallel to the movable mirror. The space between the fixed and movable mirrors might comprise, for example, a Fabry-Perot filter cavity for a spectrometer.

Abstract: According to one embodiment, a micro-electrical mechanical system apparatus includes (i) a comb drive actuator having at least one irregularly shaped finger and (ii) a movable Fabry-Perot filter cavity mirror coupled to the comb drive actuator. According to some embodiments, a relationship between a voltage applied to the comb drive actuator and an amount of displacement associated with the movable mirror is substantially linear.

Abstract: According to one embodiment, a first capacitive element may be provided and associated with a surface where a fouling layer is to be detected. A second capacitive element may also be provided, and a capacitance between the first and second capacitive elements may be used to detect formation of the fouling layer. According to another embodiment, a thermal device is provided proximate to a surface where a fouling layer is to be detected. A detector (e.g., a thermometer or vibration detector) may detect a condition associated with the surface, and formation of the fouling layer may be determined based at least in part on the condition.

Abstract: According to one embodiment, a micro-electrical mechanical system apparatus includes first and second mirrors that define a cavity. Moreover, a photonic band-gap structure coats a surface of at least one of the first or second mirrors to improve reflectivity. Another embodiment includes a third mirror, wherein the second and third mirrors form a second cavity. The spaces between the mirrors might comprise, for example, a pair of Fabry-Perot filter cavities for a spectrometer.

Abstract: According to one embodiment, a micro-electrical mechanical system apparatus includes a bi-stable actuator and at least one movable Fabry-Perot filter cavity mirror coupled to the bi-stable actuator. The bi-stable actuator may be associated with a first latched position and a second latched position and may comprise, for example, a thermal device, an electrostatic device (e.g., a parallel plate or comb drive), or a magnetic device. According to some embodiments, a relationship between a voltage applied to an actuator of a Fabry-Perot filter and an amount of displacement associated with a movable mirror is substantially linear.

Abstract: According to one embodiment, a first capacitive element may be provided and associated with a surface where a fouling layer is to be detected. A second capacitive element may also be provided, and a capacitance between the first and second capacitive elements may be used to detect formation of the fouling layer. According to another embodiment, a thermal device is provided proximate to a surface where a fouling layer is to be detected. A detector (e.g., a thermometer or vibration detector) may detect a condition associated with the surface, and formation of the fouling layer may be determined based at least in part on the condition.

Abstract: A microvalve and a method of forming a diaphragm stop for a microvalve. The microvalve includes a first layer and a diaphragm member to control the flow of fluid through the microvalve. The method comprises the step of forming a contoured shaped recess extending inward from a surface of the layer by using a laser to remove material in a series of areas, at successively greater depths extending inward from said surface. Preferably, the recess has a dome shape, and may be formed by a direct-write laser operated via a computer aided drawing program running on a computer. For example, CAD artwork files, comprising a set of concentric polygons approximating circles, may be generated to create the dome structure. The laser ablation depth can be controlled by modifying the offset step distance of the polygons and equating certain line widths to an equivalent laser tool definition.

Abstract: A microvalve and a method of forming a diaphragm stop for a microvalve. The microvalve includes a first layer and a diaphragm member to control the flow of fluid through the microvalve. The method comprises the step of forming a contoured shaped recess extending inward from a surface of the layer by using a laser to remove material in a series of areas, at successively greater depths extending inward from said surface. Preferably, the recess has a dome shape, and may be formed by a direct-write laser operated via a computer aided drawing program running on a computer. For example, CAD artwork files, comprising a set of concentric polygons approximating circles, may be generated to create the dome structure. The laser ablation depth can be controlled by modifying the offset step distance of the polygons and equating certain line widths to an equivalent laser tool definition.

Abstract: A microvalve and a method of forming a diaphragm stop for a microvalve. The microvalve includes a first layer and a diaphragm member to control the flow of fluid through the microvalve. The method comprises the step of forming a contoured shaped recess extending inward from a surface of the layer by using a laser to remove material in a series of areas, at successively greater depths extending inward from said surface. Preferably, the recess has a dome shape, and may be formed by a direct-write laser operated via a computer aided drawing program running on a computer. For example, CAD artwork files, comprising a set of concentric polygons approximating circles, may be generated to create the dome structure. The laser ablation depth can be controlled by modifying the offset step distance of the polygons and equating certain line widths to an equivalent laser tool definition.

Abstract: Dead time circuitry for ensuring that no two switching devices in a half-bridge, or in the same leg of a full-bridge, are conductive simultaneously employs a symmetrical delay circuit which independently delays the rising and falling edges of each signal pulse.

Abstract: A phase shift generator receives two input pulse signals and generates two output pulse train signals, each having a 50% duty cycle, which are phase-shifted in a range from 0.degree. to 180.degree. by an amount proportional to the duty cycle of the input pulse train signals and also proportional to the power supply load requirement.

Abstract: A primary side power supply controller includes a full-bridge/half-bridge driver and is capable of being implemented on a single HVIC chip. Control circuitry enables operation in PWM, resonant, and phase-shift control modes. In the phase-shift control mode, a phase shift generator receives two input pulse train signals and generates two output pulse train signals, each having a 50% duty cycle, which are phase-shifted in a range from 0 to 180.degree. by an amount proportional to the duty cycle of the input pulse train signals and also proportional to the power supply load requirement. Dead time circuitry for ensuring that no two switching devices in a half-bridge, or in the same leg of a full-bridge, are conductive simultaneously employs a symmetrical delay circuit which independently delays the rising and falling edges of each signal pulse.

Abstract: An on-chip DC power supply uses at least one series pass element which conducts responsive to a gating signal obtained by clamping an input potential to a preselected polarity and amplitude. A charge storage element serves to maintain an output voltage which is clamped to a predetermined maximum value. An output regulator provides a substantially constant second output voltage at a magnitude less than the output voltage set by the output clamping means.

Abstract: A digital data detector is part of the primary side control electronics in a high voltage integrated circuit for regulating a power supply secondary side output potential; the detector output is responsive to the transitions of digital error data received from the supply secondary side via an electrically-isolated data transmission means. Only the transition edges are utilized by the detector, so that any non-linearity after each transition of the transmission means is immaterial. If the isolation device is a pulse transformer, the transformer core can be of relatively small volume, as full-pulse reproduction is unimportant and pulse saturation is tolerable. A multiplexer allows the primary side control electronics to initiate power supply operation; control is switched to the secondary side responsive to signal edges therefrom being detected by the digital data detector.