Abstract: The system and method for cooling a laser using a split liquid cooled heat exchanger. The temperature of coolant entering the system is applied to a portion of the system most in need of lower temperatures and a second heat exchanger uses the outflow from the first heat exchanger to cool a remaining portion of the system that has a tolerance for higher temperatures. The laser cooling system is compact, e.g., less than 45 cubic inches and can handle thermal loads of about 800 W.

Abstract: The system and method for cooling a laser using a split liquid cooled heat exchanger. The temperature of coolant entering the system is applied to a portion of the system most in need of lower temperatures and a second heat exchanger uses the outflow from the first heat exchanger to cool a remaining portion of the system that has a tolerance for higher temperatures. The laser cooling system is compact, e.g., less than 45 cubic inches and can handle thermal loads of about 800 W.

Abstract: Techniques and structures to facilitate efficient replacement of windows/domes of optical systems, such as turreted pointer/tracker systems and seekers and other such gimbal-based or fixed targeting systems. The techniques can be implemented, for example, in a mounting ring or bezel, wherein the dome/window center of curvature is actively aligned during assembly to a reference feature on a mounting bezel during the dome-to-bezel alignment. This reference feature then mechanically registers the dome-bezel assembly to a given chassis. In some embodiments, the techniques allow for positioning of a replacement window/dome on an optical lens system, such that co-boresight of multiple beam paths is automatically maintained.

Abstract: Techniques and architecture are disclosed for implementing an optical dome bezel to interface an optical dome/window and a housing of differing coefficients of thermal expansion (CTEs), In some embodiments, the bezel may comprise a material (e.g., Ti-6Al-4V) that is CTE-matched to the optical dome material (e.g., silicon, germanium, sapphire, ALON), thereby mitigating temperature effects on system performance. In some embodiments, the bezel may include a radially compliant flexure feature (e.g., flexure blades, spring-form S-channels), which mitigates physical stress effects (e.g., vibration, thermal expansion/contraction, etc.) on system performance. In some embodiments, the bezel may include an integral environmental sealing feature (e.g., O-ring gaskets), which protects internal optics/electronics from external environmental hazards (e.g., moisture, corrosive substances, particulates, debris).

Abstract: Techniques and architecture are disclosed for implementing an optical dome bezel to interface an optical dome/window and a housing of differing coefficients of thermal expansion (CTEs), In some embodiments, the bezel may comprise a material (e.g., Ti-6Al-4V) that is CTE-matched to the optical dome material (e.g., silicon, germanium, sapphire, ALON), thereby mitigating temperature effects on system performance. In some embodiments, the bezel may include a radially compliant flexure feature (e.g., flexure blades, spring-form S-channels), which mitigates physical stress effects (e.g., vibration, thermal expansion/contraction, etc.) on system performance. In some embodiments, the bezel may include an integral environmental sealing feature (e.g., O-ring gaskets), which protects internal optics/electronics from external environmental hazards (e.g., moisture, corrosive substances, particulates, debris).

Abstract: Techniques and structures are disclosed to facilitate efficient replacement of windows/domes of optical systems, such as turreted pointer/tracker systems and seekers and other such gimbal-based or fixed targeting systems. The techniques can be implemented, for example, in a mounting ring or bezel, wherein the dome/window center of curvature is actively aligned during assembly to a reference feature on a mounting bezel during the dome-to-bezel alignment. This reference feature then mechanically registers the dome-bezel assembly to a given chassis. In some embodiments, the techniques allow for positioning of a replacement window/dome on an optical lens system, such that co-boresight of multiple beam paths is automatically maintained.

Abstract: A substrate processing apparatus has a frame and a load port connected to the frame and adapted to mate a substrate transport container to the frame. The apparatus has transportable storage that is adapted to be removably connected to the frame and fit beneath the load port. The storage may be an enclosure housing electrical, mechanical, or electromechanical devices of the substrate processing apparatus.

Abstract: A substrate processing apparatus has a frame and a load port connected to the frame and adapted to mate a substrate transport container to the frame. The apparatus has transportable storage that is adapted to be removably connected to the frame and fit beneath the load port. The storage may be an enclosure housing electrical, mechanical, or electromechanical devices of the substrate processing apparatus.

Abstract: A substrate processing apparatus has a frame and a load port connected to the frame and adapted to mate a substrate transport container to the frame. The apparatus has transportable storage that is adapted to be removably connected to the frame and fit beneath the load port. The storage may be an enclosure housing electrical, mechanical, or electromechanical devices of the substrate processing apparatus.

Abstract: A substrate processing apparatus has a frame and a load port connected to the frame and adapted to mate a substrate transport container to the frame. The apparatus has transportable storage that is adapted to be removably connected to the frame and fit beneath the load port. The storage may be an enclosure housing electrical, mechanical, or electromechanical devices of the substrate processing apparatus.

Abstract: A substrate loading device having a frame, a cassette support, and a user interface. The frame is connected to a substrate processing apparatus. The frame has a transport opening through which substrates are transported between the device and processing apparatus. The cassette support is connected to the frame for holding at least one substrate holding cassette. The user interface is arranged for inputting information, and is mounted to the frame so that the user interface is integral with the frame.