Patents by Inventor Glenn Tom

Glenn Tom has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of abating of effluents from chemical vapor deposition processes using organometallic source reagents
    Patent number: 6391385
    Abstract: A method and apparatus for abatement of effluent from a CVD process using a source reagent having a metal organic loosely bound to a organic or organomettalic molecule such that upon exposure to heat such bond is readily cleavable, e.g., copper deposition process involving the formation of films on a substrate by metalorganic chemical vapor deposition (CVD) utilizing a precursor composition for such film formation. The abatement process in specific embodiments facilitates high efficiency abatement of effluents from copper deposition processes utilizing Cu(hfac)TMVS as a copper source reagent.
    Type: Grant
    Filed: October 18, 1999
    Date of Patent: May 21, 2002
    Assignee: Advanced Technology Materials, Inc.
    Inventors: Mark Holst, Ray Dubois, Jose Arno, Rebecca Faller, Glenn Tom