Patents by Inventor Glenn V. Sincerbox

Glenn V. Sincerbox has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Optical system for focus correction for a lithographic tool
    Patent number: 4645338
    Abstract: An apparatus and process for determining focus correction for a lithographic tool are provided. A periodic surface relief structure containing focus information is illuminated so that diffraction beams are generated. An object is translated orthogonally to the periodic structure to cause a change in the intensity of the diffracted beams. Focus correction is determined based upon the changes in the intensity of the diffracted beams.
    Type: Grant
    Filed: April 26, 1985
    Date of Patent: February 24, 1987
    Assignee: International Business Machines Corporation
    Inventors: Anthony Juliana, Jr., Milton R. Latta, Glenn V. Sincerbox, Carlton G. Willson