Abstract: Exemplary embodiments provide a micro-scale optical force sensor. The device includes a scale grating, a linearly displaceable index grating positioned above and in initial alignment with the scale grating, the index grating aligned with the scale grating absent a force applied to the index grating, and a compliant linkage assembly joined coplanar to the displaceable index grating. The linkage assembly includes at least three rigid support links laterally extending from each of opposing longitudinal edges of the index grating, a displaceable rigid link formed between adjacent support links, and compliant links interposed between a distal end of rigid support links and an inner end of each displaceable rigid link, and interposed between an outer end of rigid support links and the substrate, the compliant links normally biasing the displaceable rigid link parallel to the rigid support links and perpendicular to a longitudinal axis of the index grating.

Abstract: A tiltable micromirror device is disclosed in which a micromirror is suspended by a progressive linkage with an electrostatic actuator (e.g. a vertical comb actuator or a capacitive plate electrostatic actuator) being located beneath the micromirror. The progressive linkage includes a pair of torsion springs which are connected together to operate similar to a four-bar linkage with spring joints. The progressive linkage provides a non-linear spring constant which can allow the micromirror to be tilted at any angle within its range substantially free from any electrostatic instability or hysteretic behavior.