Abstract: According to the invention, a transport box ‘1) may be connected to an interface (2) and contain a basket ‘3) in which the substrates (4) may be placed. The basket (3) consists of a set of plates (3a-3f), stacked one after the other and individually replaceable. The basket (3) is entirely shifted to the interior of the interface (2), then the means of movement isolating a selected plate by moving the adjacent places, allowing the robot (5) to come and extract the selected substrate. When in a transport position, the plates (3a-3f) are in contact with each other, therefore reducing the amount of space taken up by the substrates (4).

Abstract: A method of detecting gaseous species in a mixture by light-emission spectroscopy, in which use is made of the radiation emitted by a plasma (4) present in the gas mixture under analysis, a measurement system (20) is used to take a raw optical spectrum of said radiation emitted by the plasma (4), and the raw optical spectrum is compared with a library of reference optical spectra, the method comprising a step of generating a pruned optical spectrum, which step consists in making use, in the raw optical spectrum, of only those zones of the spectrum that present a significant shape corresponding to a predefined shape criterion, and subsequently said pruned spectrum is compared with the library of reference optical spectra.

Abstract: A method and apparatus for detecting minority gaseous species in a mixture by light-emission spectroscopy by means of an optical spectrometer (8), in which the radiation emitted by a plasma (4) present in the gas mixture for analysis is used and, in the spectrum of the radiation, lines are identified of a majority gaseous species that present amplitudes that are sensitive to the presence of a minority species, and information about the concentration of a minority gaseous species is deduced from the amplitude(s) of the sensitive line(s). This makes it possible to monitor minority gaseous species in real time.

Abstract: The cryogenic trap of the invention comprises, in a hollow body (3) having an access valve (2) and an outlet valve (6), a cold core (11) associated with a plate (13) having low thermal inertia and movable between a trapping position in contact with the cold core (11), and a regeneration position spaced apart from the cold core (11) and in contact with a heater ring (14). The plate (13) is in contact with gases to be trapped, and prevents them from passing to the cold core (11). Regeneration requires heating only of the plate (13) carrying the condensed and solidified gases, and it is therefore more rapid.

Abstract: In the invention, the atmosphere in a process chamber is conditioned using a primary pump, a secondary pump, speed control means for controlling the speed of the primary pump, and at least first gas analyzer means adapted for analyzing the extracted gases upstream from the primary pump and for producing first analysis signals. First signal processing means control the pumping speed as a function of the first analysis signals, so as to determine the variation in the pressure inside the process chamber during the transient stages of the treatment. In this way, deposits and turbulence are avoided in the process chamber, as are deposits in the pumping line, so that the secondary pump can be placed in the immediate vicinity of the process chamber.

Abstract: The cryogenic trap of the invention comprises, in a hollow body (3) having an access valve (2) and an outlet valve (6), a cold core (11) associated with a plate (13) having low thermal inertia and movable between a trapping position in contact with the cold core (11), and a regeneration position spaced apart from the cold core (11) and in contact with a heater ring (14). The plate (13) is in contact with gases to be trapped, and prevents them from passing to the cold core (11). Regeneration requires heating only of the plate (13) carrying the condensed and solidified gases, and it is therefore more rapid.

Abstract: The invention provides a method and apparatus for detecting minority gaseous species in a mixture by light-emission spectroscopy by means of an optical spectrometer (8), in which the radiation emitted by a plasma (4) present in the gas mixture for analysis is used and, in the spectrum of said radiation, lines are identified of a majority gaseous species that present amplitudes that are sensitive to the presence of a minority species, and information about the concentration of a minority gaseous species is deduced from the amplitude(s) of said sensitive line(s). This makes it possible to monitor minority gaseous species in real time.

Abstract: A method of detecting gaseous species in a mixture by light-emission spectroscopy, in which use is made of the radiation emitted by a plasma (4) present in the gas mixture under analysis, a measurement system (20) is used to take a raw optical spectrum of said radiation emitted by the plasma (4), and the raw optical spectrum is compared with a library of reference optical spectra, the method comprising a step of generating a pruned optical spectrum, which step consists in making use, in the raw optical spectrum, of only those zones of the spectrum that present a significant shape corresponding to a predefined shape criterion, and subsequently said pruned spectrum is compared with the library of reference optical spectra.

Abstract: In the invention, the atmosphere in a vacuum chamber (1) is conditioned using a primary pump (3), a secondary pump (2), speed control means (6, 7) for controlling the speed of the primary pump, and at least first gas treatment means (5) adapted for treating the extracted gases downstream from the primary pump (3). The vacuum chamber (1) is contained in a room (130) having a false floor (36) covering a space (37). The primary pump (3) and the gas treatment means (5) are housed in the available space (37) under the false floor (36), so that the secondary pump (2) can be placed in the immediate vicinity of the vacuum chamber (1), and the primary pump (3) is in the proximity of the vacuum chamber (1).

Abstract: In the invention, the atmosphere in a vacuum chamber (1) is conditioned using a primary pump (3), a secondary pump (2), speed control means (6, 7) for controlling the speed of the primary pump, and at least first gas treatment means (5) adapted for treating the extracted gases downstream from the primary pump (3). The vacuum chamber (1) is contained in a room (130) having a false floor (36) covering a space (37). The primary pump (3) and the gas treatment means (5) are housed in the available space (37) under the false floor (36), so that the secondary pump (2) can be placed in the immediate vicinity of the vacuum chamber (1), and the primary pump (3) is in the proximity of the vacuum chamber (1).

Abstract: In the invention, the atmosphere in a process chamber is conditioned using a primary pump, a secondary pump, speed control means for controlling the speed of the primary pump, and at least first gas analyzer means adapted for analyzing the extracted gases upstream from the primary pump and for producing first analysis signals. First signal processing means control the pumping speed as a function of the first analysis signals, so as to determine the variation in the pressure inside the process chamber during the transient stages of the treatment. In this way, deposits and turbulence are avoided in the process chamber, as are deposits in the pumping line, so that the secondary pump can be placed in the immediate vicinity of the process chamber.

Abstract: In the invention, the atmosphere in a process chamber is conditioned using a primary pump, a secondary pump, speed control means for controlling the speed of the primary pump, and at least first gas analyzer means adapted for analyzing the extracted gases upstream from the primary pump and for producing first analysis signals. First signal processing means control the pumping speed as a function of the first analysis signals, so as to determine the variation in the pressure inside the process chamber during the transient stages of the treatment. In this way, deposits and turbulence are avoided in the process chamber, as are deposits in the pumping line, so that the secondary pump can be placed in the immediate vicinity of the process chamber.