Patents by Inventor Go-jun Kim

Go-jun Kim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Etching method using plasma, and method of fabricating semiconductor device including the etching method
    Patent number: 9520301
    Abstract: An etching method using plasma includes generating plasma by supplying process gases to at least one remote plasma source (RPS) and applying power to the at least one RPS, and etching an etching object by supplying water (H2O) and the plasma to a process chamber.
    Type: Grant
    Filed: August 6, 2015
    Date of Patent: December 13, 2016
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Go-jun Kim, Vladimir Volynets, Sang-jin An, Hee-jeon Yang, Sang-heon Lee, Sung-keun Cho, Xinglong Chen, In-ho Choi
  • ETCHING METHOD USING PLASMA, AND METHOD OF FABRICATING SEMICONDUCTOR DEVICE INCLUDING THE ETCHING METHOD
    Publication number: 20160111298
    Abstract: An etching method using plasma includes generating plasma by supplying process gases to at least one remote plasma source (RPS) and applying power to the at least one RPS, and etching an etching object by supplying water (H2O) and the plasma to a process chamber.
    Type: Application
    Filed: August 6, 2015
    Publication date: April 21, 2016
    Inventors: Go-jun Kim, Vladimir Volynets, Sang-jin An, Hee-jeon Yang, Sang-heon Lee, Sung-keun Cho, Xinglong Chen, In-ho Choi