Patents by Inventor Go Matsuda

Go Matsuda has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6284661
    Abstract: A method and an apparatus for cutting a wafer from a crystalline ingot, by directing a stream or streams of etching gas at the crystalline ingot in a vacuum. Waste in cutting can be greatly minimized and the work environment can also be kept clean. Further, excellent surface smoothness can be realized on the cut wafers.
    Type: Grant
    Filed: April 4, 1997
    Date of Patent: September 4, 2001
    Assignee: Daido Hoxan Inc.
    Inventors: Takashi Yokoyama, Kazuma Yamamoto, Masato Yamamoto, Takahiro Mishima, Go Matsuda, Shigeki Itou
  • Patent number: 5972795
    Abstract: A method and an apparatus for producing a wafer from a crystalline ingot, wherein the method supplies an etching gas, having a high etching property for at least one constituent of the crystalline ingot, in a state of a molecular beam stream on a predetermined part of the crystalline ingot to be processed, volatilizing the predetermined part gradually from the ingot, and then removing the predetermined part entirely so as to cut the wafer from the ingot. According to the method, waste in cutting can be greatly minimized and the work environment can also be kept clean. Further, excellent surface smoothness can be realized on the cut wafers.
    Type: Grant
    Filed: April 4, 1997
    Date of Patent: October 26, 1999
    Assignee: Daido Hoxan Inc.
    Inventors: Takashi Yokoyama, Kazuma Yamamoto, Masato Yamamoto, Takahiro Mishima, Go Matsuda, Shigeki Itou
  • Patent number: D803945
    Type: Grant
    Filed: October 6, 2016
    Date of Patent: November 28, 2017
    Inventor: Go Matsuda
  • Patent number: D803946
    Type: Grant
    Filed: October 6, 2016
    Date of Patent: November 28, 2017
    Inventor: Go Matsuda
  • Patent number: D809472
    Type: Grant
    Filed: December 12, 2016
    Date of Patent: February 6, 2018
    Inventor: Go Matsuda