Patents by Inventor Goen Hui KIM

Goen Hui KIM has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • CLEANING DEVICE AND METHOD OF SUBSTRATE TRANSFER DEVICE
    Publication number: 20220280985
    Abstract: A cleaning device for a substrate transfer device comprises a traveling unit configured to travel along a rail having first and second areas, a rail unit including the rail and a rail structure disposed on the rail, and a rinsing unit including a suction part disposed on the rail and that rotates about a suction nozzle. When the rinsing unit is placed in contact with the rail structure, the suction part rotates about the suction nozzle.
    Type: Application
    Filed: February 16, 2022
    Publication date: September 8, 2022
    Applicants: SAMSUNG ELECTRONICS CO., LTD., SEMES CO., LTD.
    Inventors: Min Soo PARK, Ji Hun KIM, Gyeong Dam BAEK, Min-Gu CHANG, Tae Hyun JO, Ji Yoon JUNG, Su Hyun KIM, Hyun Gyu ROH, Se Woong AHN, Goen Hui KIM, Hyo Joo JEOUN