Patents by Inventor Goetz GOERISCH

Goetz GOERISCH has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • WATER COOLED VALVE
    Publication number: 20110140023
    Abstract: A lock valve is adapted for locking a process chamber. The lock valve includes a valve flap adapted for sealing an aperture of the process chamber where a substrate to be processed may be inserted or ejected. A cooling unit is adapted for cooling the valve flap by means of a cooling fluid. At least one valve flap hinge is adapted for connecting the process chamber with the valve flap. The valve flap hinge furthermore includes at least one pipe in fluid communication with the cooling unit of the valve flap.
    Type: Application
    Filed: December 18, 2009
    Publication date: June 16, 2011
    Applicant: APPLIED MATERIALS, INC.
    Inventors: Andreas SAUER, Harald WURSTER, Josef HOFFMANN, Goetz GOERISCH