Abstract: An inspection apparatus A for a hydrogen gas dispenser includes a receiving-side gas flowing unit 1 including a receptacle 11 configured to be connected to a nozzle C1 of a hydrogen gas dispenser C and an inspection unit including a rate-of-pressure-rise inspection unit 2 configured to measure a rate of pressure rise of hydrogen gas from the hydrogen gas dispenser C and a dispensed-amount inspection unit 3 configured to measure a dispensed amount of the hydrogen gas. The inspection apparatus A for a hydrogen gas dispenser is capable of measuring a dispensed amount and a rate of pressure rise of the hydrogen gas dispenser.

Abstract: An inspection apparatus A for a hydrogen gas dispenser includes a receiving-side gas flowing unit 1 including a receptacle 11 configured to be connected to a nozzle C1 of a hydrogen gas dispenser C and an inspection unit including a rate-of-pressure-rise inspection unit 2 configured to measure a rate of pressure rise of hydrogen gas from the hydrogen gas dispenser C and a dispensed-amount inspection unit 3 configured to measure a dispensed amount of the hydrogen gas. The inspection apparatus A for a hydrogen gas dispenser is capable of measuring a dispensed amount and a rate of pressure rise of the hydrogen gas dispenser.

Abstract: A sampling apparatus includes a pressure-reducing safety unit, which includes a device accommodation chamber that accommodates safety devices and a cylinder connection chamber, and a cylinder unit. The cylinder unit removably accommodates a cylinder, excluding an exposed portion where a front end portion of the cylinder, a mouthpiece, and a cylinder on-off valve are exposed, in an openable/closable casing. The exposed portion of the cylinder is formed so as to be insertable from the open surface portion of the cylinder connection chamber into the cylinder connection chamber, the mouthpiece of the cylinder and a hydrogen outlet of a supply pipe of the device accommodation chamber are connected by using a flexible hose, and thereby a sample of hydrogen gas is taken into the cylinder.

Abstract: A sampling apparatus includes a pressure-reducing safety unit, which includes a device accommodation chamber that accommodates safety devices and a cylinder connection chamber, and a cylinder unit. The cylinder unit removably accommodates a cylinder, excluding an exposed portion where a front end portion of the cylinder, a mouthpiece, and a cylinder on-off valve are exposed, in an openable/closable casing. The exposed portion of the cylinder is formed so as to be insertable from the open surface portion of the cylinder connection chamber into the cylinder connection chamber, the mouthpiece of the cylinder and a hydrogen outlet of a supply pipe of the device accommodation chamber are connected by using a flexible hose, and thereby a sample of hydrogen gas is taken into the cylinder.

Abstract: The disclosed device and method produce high concentration ozonated water by connecting a high concentration ozone gas-supplying system that comprises an ozone gas-generating unit (1) for forming ozone gas, an ozone gas-concentrating unit (2) for concentrating the ozone gas formed, a concentrated ozone gas-pressurizing unit (3) for pressurizing the concentrated ozone gas output from the ozone gas-concentrating unit (2), and a cooling mechanism (13) for cooling the concentrated ozone gas-pressurizing unit (3), to an ozone gas-dissolving unit (4) to dissolve the high pressure, concentrated ozone gas in pure water and produce the high concentration ozonated water.

Abstract: A method of concentrating ozone gas including: causing ozone gas contained in ozone-oxygen mixture gas to be selectively adsorbed to adsorbents which are filled in a non-cooled state in at least two adsorbing cylinders arranged parallel to one another; desorbing the ozone gas from the adsorbents by subjecting a depressurizing process to each adsorbing cylinder during an ozone gas desorption operation; repeating an adsorption step and a desorption step alternately in the at least two adsorbing cylinders; and controlling the adsorbing cylinders, in such a way that one of the adsorbing cylinders is performing the adsorption step while another one of the adsorbing cylinders is performing the desorption step.

Abstract: The disclosed device and method produce high concentration ozonated water by connecting a high concentration ozone gas-supplying system that comprises an ozone gas-generating unit (1) for forming ozone gas, an ozone gas-concentrating unit (2) for concentrating the ozone gas formed, a concentrated ozone gas-pressurizing unit (3) for pressurizing the concentrated ozone gas output from the ozone gas-concentrating unit (2), and a cooling mechanism (13) for cooling the concentrated ozone gas-pressurizing unit (3), to an ozone gas-dissolving unit (4) to dissolve the high pressure, concentrated ozone gas in pure water and produce the high concentration ozonated water.

Abstract: A method of concentrating ozone gas including: causing ozone gas contained in ozone-oxygen mixture gas to be selectively adsorbed to adsorbents which are filled in a non-cooled state in at least two adsorbing cylinders arranged parallel to one another; desorbing the ozone gas from the adsorbents by subjecting a depressurizing process to each adsorbing cylinder during an ozone gas desorption operation; repeating an adsorption step and a desorption step alternately in the at least two adsorbing cylinders; and controlling the adsorbing cylinders, in such a way that one of the adsorbing cylinders is performing the adsorption step while another one of the adsorbing cylinders is performing the desorption step.

Abstract: The present invention provides a method and an apparatus for condensing ozone arranged so as to efficiently take out the ozone gas of a predetermined concentration, although its construction is simple. The method for condensing the ozone gas comprises acting ozone-oxygen mixture gas on an adsorbing cylinder which is filled in its interior area with an adsorbent so as to selectively adsorb the ozone gas to an adsorbent and desorbing the selectively adsorbed ozone gas so as to condense and purify the ozone gas. The method further includes acting the ozone-oxygen mixture gas on the adsorbent in non-cooled state to selectively adsorb the ozone gas to the adsorbent and vacuuming the adsorbing cylinder on performing desorption-operation of the ozone gas to desorb the ozone gas from the adsorbent.

Abstract: The present invention provides a method and an apparatus for condensing ozone arranged so as to efficiently take out the ozone gas of a predetermined concentration, although its construction is simple. The method for condensing the ozone gas comprises acting ozone-oxygen mixture gas on an adsorbing cylinder which is filled in its interior area with an adsorbent so as to selectively adsorb the ozone gas to an adsorbent and desorbing the selectively adsorbed ozone gas so as to condense and purify the ozone gas. The method further includes acting the ozone-oxygen mixture gas on the adsorbent in non-cooled state to selectively adsorb the ozone gas to the adsorbent and vacuuming the adsorbing cylinder on performing desorption-operation of the ozone gas to desorb the ozone gas from the adsorbent.

Abstract: A method for generating highly concentrated ozone gas by adsorbing ozone gas generated by an ozonizer with an absorbent within an adsorption column and then separating highly concentrated ozone gas from the adsorption column. Three adsorption columns are arranged in parallel. Each of the adsorption columns is controlled to repeat four steps of an ozone gas adsorbing step, a stabilizing and pressurizing step, an ozone gas desorbing step and a cooling down step. Each of the ozone gas adsorbing step and the ozone gas desorbing step has operation time set twice the operation time of each of the stabilizing and pressurizing step and the cooling down step. An ozone gas concentrating unit comprises three adsorption columns which are set to operate one after another by ⅓ cycle lag. Highly concentrated ozone gas separated at the desorbing step of each adsorption column is once stored in an ozone gas storage vessel.

Abstract: A high-concentration ozone gas having a concentration of at least 50 VOL % of ozone in the ozone-oxygen system is acted within the temperature range of a normal temperature to 60.degree. C. on an ultrapurity-gas piping system for use in a semiconductor manufacturing apparatus and the like or on a metal component part for use in an ultrahigh-vacuum apparatus to form a passivation film on the interior metal surface thereof.