Abstract: A block valve and a block valve for a raw material container having a structure in which a retaining part of a liquid material or cleaning fluid is not present inside. In the block valve, a first side of a main flow path in communication with a supply route of a block body and a first minimal port part of a first diaphragm valve in a tilted state with respect to the block body are connected, a second side of the main flow path and a second minimal port part of a second diaphragm valve are connected, a port opening of the second diaphragm valve is in communication with a supply port part, and a joint port part of the first diaphragm valve and a connection line in a vertical direction are connected by a communication path.

Abstract: A block valve and a block valve for a raw material container having a structure in which a retaining part of a liquid material or cleaning fluid is not present inside. In a block valve (10), one side of a main flow path (18) communicating with a supply route (14) of a block body (11) and a first minimal port part (21) of a first diaphragm valve (12) disposed in a tilted state with respect to the block body are connected, another side of the main flow path and a second minimal port part (22) of a second diaphragm valve (13) are connected, a port opening (25) of the second diaphragm valve is communicated by a supply port part (15), and a joint port part (23) of the first diaphragm valve and a connection line (16) in a vertical direction are connected by a communication path (19).

Abstract: Disclosed is a substrate processing apparatus that includes: a processing chamber that accommodates a substrate; and a raw material supply system that sublimates a solid raw material to generate a gas raw material used for processing of the substrate, and supplies the generated gas raw material to the processing chamber. The raw material supply system includes: a solid raw material container that stores the solid raw material; a first piping connected between the solid raw material container and the processing chamber; and a second piping connected with the solid raw material container and equipped with an attachment portion to which a raw material replenishing container that holds the solid raw material for replenishment is attached.