Abstract: Disclosed are an electrical apparatus, a method for manufacturing an electrical apparatus, and a motor vehicle, and the electrical apparatus. In the apparatus, a chamber includes a first electrical element located at a first position and a second electrical element located at a second position, the first electrical element and the second electrical element having different heat dissipation characteristics. The electrical apparatus further includes a potting spacer, the potting spacer separating the chamber into two sub-chambers: a first sub-chamber and a second sub-chamber. The first electrical element is located in the first sub-chamber, and the second electrical element is located in the second sub-chamber.

Abstract: A heat dissipation device (2) for an electronic component is disclosed. The heat dissipation device includes a heat dissipating component (20) disposed on a first side of the electronic component (1); at least one elastic element (30) arranged on a second side of the electronic component (1) opposite the first side; a pressure plate (40) arranged such that the at least one elastic element (30) is located between the pressure plate (40) and the electronic component (1), the pressure plate (40) being connected to a fixed structure to apply pressure to the electronic component (1) via the at least one elastic element (30) in the direction of the heat dissipating component (20). An AC-DC converter or a DC-AC converter or a DC-DC converter comprising the heat dissipation device, and a motor vehicle comprising the above converter are also disclosed.

Abstract: Disclosed are an electrical apparatus, a method for manufacturing an electrical apparatus, and a motor vehicle, the electrical apparatus (100) comprising: a chamber (110), the chamber (110) at least comprising a first electrical element (120) located at a first position and a second electrical element (130) located at a second position, the first electrical element (120) and the second electrical element (130) having different heat dissipation characteristics; wherein the electrical apparatus further comprises a potting spacer (140), the potting spacer (140) separating the chamber (110) into two sub-chambers: a first sub-chamber (111) and a second sub-chamber (112), and the first electrical element (120) is located in the first sub-chamber (111), the second electrical element (130) is located in the second sub-chamber (112).

Abstract: A method and an apparatus for dechucking an electrostatic chuck are disclosed. The gas escapes through an opening between a wafer and a chuck in each stage of a multi-stages process. In each stage, during at least a portion of the stage, the chucking voltage is reduced to a value less than the least threshold voltage needed for holding the wafer, so that the wafer is pushed away from the chuck by the gas. Hence, the gas can escape from an opening between the wafer and the chuck, thereby increasing the dechucking rate. By controlling the decrement and/or the duration of the reduced voltage, any potential damages due to the pushed-away wafer can be minimized.

Abstract: A method and an apparatus for dechucking an electrostatic chuck are disclosed. The gas escapes through an opening between a wafer and a chuck in each stage of a multi-stages process. In each stage, during at least a portion of the stage, the chucking voltage is reduced to a value less than the least threshold voltage needed for holding the wafer, so that the wafer is pushed away from the chuck by the gas. Hence, the gas can escape from an opening between the wafer and the chuck, thereby increasing the dechucking rate. By controlling the decrement and/or the duration of the reduced voltage, any potential damages due to the pushed-away wafer can be minimized.

Abstract: One embodiment relates to a method of automated microalignment using off-axis beam tilting. Image data is collected from a region of interest on a substrate at multiple beam tilts. Potential edges of a feature to be identified in the region are determined, and computational analysis of edge-related data is performed to positively identify the feature(s). Another embodiment relates to a method of automated detection of undercut on a feature using off-axis beam tilting. For each beam tilt, a determination is made of difference data between the edge measurement of one side and the edge measurement of the other side. An undercut on the feature is detected from the difference data. Other embodiments are also disclosed.