Patents by Inventor Gopalakrishna B. Prahbu

Gopalakrishna B. Prahbu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of controlling a polishing machine
    Patent number: 6439964
    Abstract: Recipes for the polishing machine, such as recipes for carrier head pressure, are generated from empirical data, and consequently can provide a more accurate prediction than techniques based upon theoretical models. A plurality of test substrates are polished with a plurality of parameter sets. A polishing profile is measured for each of the plurality of test substrates, and a polishing time is calculated for each polishing parameter set which minimizes the difference between a predicted substrate profile and a desired substrate profile.
    Type: Grant
    Filed: June 30, 2000
    Date of Patent: August 27, 2002
    Assignee: Applied Materials, Inc.
    Inventors: Gopalakrishna B. Prahbu, Steven T. Mear
  • Carrier head with controllable edge pressure
    Patent number: 6361419
    Abstract: A carrier head for a chemical mechanical polishing apparatus includes a flexible membrane that applies a load to a substrate. A volume between the flexible membrane and a carrier structure provides a chamber. A body located in the chamber has a first portion that applies pressure to a first region of an upper surface of a central portion of the flexible membrane and a second portion that is separable and movable into contact with a second region of the upper surface of the central portion of the flexible membrane.
    Type: Grant
    Filed: March 27, 2000
    Date of Patent: March 26, 2002
    Assignee: Applied Materials, Inc.
    Inventors: Steven M. Zuniga, Gopalakrishna B. Prahbu, Steven T. Mear