Patents by Inventor Gordon Alex Macdonald

Gordon Alex Macdonald has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • HIGH DENSITY, MODULUS, AND HARDNESS AMORPHOUS CARBON FILMS AT LOW PRESSURE
    Publication number: 20220282366
    Abstract: Provided herein are methods and related apparatus for depositing an ashable hard mask (AHM) on a substrate in a low pressure chamber using a dual frequency radio frequency component. Low pressure plasma enhanced chemical vapor deposition may be used to increase the etch selectivity of the AHM, permitting the use of a thinner AHM for semiconductor processing operations.
    Type: Application
    Filed: August 28, 2020
    Publication date: September 8, 2022
    Applicant: Lam Research Corporation
    Inventors: Matthew Scott Weimer, Ragesh Puthenkovilakam, Gordon Alex Macdonald, Shaoqing Zhang, Shih-Ked Lee, Jun Xue, Samantha S.H. Tan, Xizhu Zhao, Mary Anne Manumpil, Eric A. Hudson, Chin-Jui Hsu