Patents by Inventor Gordon Kenneth McGinty

Gordon Kenneth McGinty has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 3993509
    Abstract: A semiconductor wafer is electrostatically clamped against a support by positioning an intermediate solid dielectric layer therebetween and applying a potential difference, thereby firmly and evenly clamping the wafer for photoresist or ion beam implantation operations.
    Type: Grant
    Filed: October 29, 1974
    Date of Patent: November 23, 1976
    Assignee: U.S. Philips Corporation
    Inventor: Gordon Kenneth McGinty